INFICON Composer Gas Concentration Controller - Manual (Page 170)

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Composer Operating Manual
8.3.5.3 Dilution MFC (sccm)
Full Scale: . . . . . . . . . . . . . . . . . . A numeric data field representing the
maximum flow range (sccm) of the Mass
Flow Controller used to control dilution gas
flow. This parameter accepts values
from 0 to 5000.
Max: . . . . . . . . . . . . . . . . . . . . . . . A numeric data field representing the
maximum flow to be allowed. This
parameter accepts numbers from 0 to 2000
(sccm) and must not exceed Full Scale
value.
NOTE: The dilution flow parameters are only active if SW#5
on CFGR2 is set.
8.3.5.4 Channel Flow (sccm)
Total Flow: . . . . . . . . . . . . . . . . . . A numeric data field representing the
targeted total flow from the controlled gas
channels into the reactor. It is the sum of
the manipulated bubbler Flow and the
slaved dilution Flow. This parameter
accepts numbers from 0 to 2000 (sccm). It
must not exceed the sum of bubbler max
flow and dilution max flow.
8.3.5.5 Control Input Range (%)
Max (%): . . . . . . . . . . . . . . . . . . . . A numeric data field representing the
concentration target corresponding to
maximum allowed analog input signal
(Sw#7 of CFGR2). This parameter accepts
numbers from
0 to 100 (%).
Min (%): . . . . . . . . . . . . . . . . . . . . A numeric data field representing the
concentration target corresponding to 0.0
volt at the Control Input. This parameter
accepts numbers from 0 to 100 (%) and
must not exceed the value in the Max field.
8.3.5.6 Loop Parameters
Process Gain: (Mole-%/V) . . . . . . A numeric data field representing the
Processes’ gain ( concentration (%) /
output (volts)). This parameter accepts
numbers from 0.0001 to 999.9999.
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