Yokogawa Single Channel Oxygen Analyzer System ZR22/ZR402 - Manual (Page 99)

IM 11M13A01-02E 6-4
6.3 ZA8F Flow Setting Unit, ZR40H Automatic Calibra-
tion Unit
Reference gas flow
setting valve
Span gas flow
setting valve
Zero gas flow
setting valve
Flow meter for
reference gas
Flow meter for
calibration gas
F6.4E.EPS
Figure 6.4 ZA8F Flow Setting Unit
CAL.OUT REF.OUT
Made in Japan
ZERO IN SPAN IN
F6.5E.EPS
Flow meter for
calibration gas
Flow meter for
reference gas
Terminal Box
Reference gas flow
setting valve
Calibration gas flow
setting valve
Figure 6.5 ZR40H Automatic Calibration Unit