2 qcm grid – INFICON Guardian EIES Controller User Manual

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Guardian Co-Deposition Controller Operating Manual

3.6.6.2 QCM Grid

Cal QCM#: Establishes which QCM sensor is used to calibrate this channel's EIES
detector.

Density: Sets the QCM density for this material. Material density has a significant
impact on deposition calculations when a QCM is used for calibration or control.
See

Appendix B

for common material densities.

Z-Factor: Sets the QCM Z-Factor or Z-Ratio, the measure of a material's effect
with increased thickness on QCM accuracy. See

Appendix B

for common material

Z-ratios.

Tooling %: Adjusts for deposition rates measured by the QCM that differ from the
substrate deposition rate. A higher tooling value yields higher rates. See

Figure

3-19

. For example, if the sensor sees only 50% of the substrate rate, set Tooling to

200%. Setting Tooling to 0% causes a sensor to be ignored for this film.

The defining equation is:

[6]

Figure 3-19 Tooling Value

Cal Accuracy%: The EIES channel calibration accuracy to be achieved during
QCM calibration. A lower value means higher accuracy is required.

Cal Interval: The time interval between automatic QCM calibration of the EIES
channel. Set to 00:00:00 to disable periodoc automatic calibration.

Cal Sample: The time the QCM shutter remains open for QCM calibration of the
EIES channel.

Calibrate: Starts a QCM calibration cycle as defined by Cal Accuracy, Cal Interval
and Cal Sample. Shown only when the Layer version of this dialog box is selected.

Substrate Thick

Sensor Thick

-------------------------------------

Correct Tooling

Current Tooling

--------------------------------------

Substrate

Tooling

Over 100%

Tooling

Under 100%