INFICON Guardian EIES Controller - Manual (Page 25)

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Guardian Co-Deposition Controller Operating Manual
Chapter 2
Quick Start
2.1 Introduction
This section covers the minimum system connections and software setup needed
to run the EIES-IV Guardian system. Consult later chapters for more detailed
installation and operating instructions.
2.2 Installation
2.2.1 Sensor Installation
Placement of the EIES sensor is the most significant factor determining EIES
system performance. The sensor must be placed so that the material vapor flux
reaches the sensor without obstruction. The sensor opening must be oriented so
that material can pass through the sensor without accumulating inside the sensor,
with the smaller sensor cutout toward the flux. See
Figure 2-1 . See Chapter 4 for
detailed installation instructions.
NOTE: The sensor will not pass through the 2.75 in.CF (NW35CF) port. If the
chamber is too small to allow installation from the inside, a 4.5 in. CF
(NW63CF) or larger flange adapted to the 2.75 in. CF flange is required to
allow the entire sensor to pass through.
Figure 2-1 Sensor Placement
Electrical Feedthroughs
For Sensor Filament
Sapphire Window
1.33 in. CF Flange
2.75 in. CF Flange
Telescoping Tubing
For Length Adjustment
Vapor
Flux
EIES Sensor