INFICON Guardian EIES Controller - Manual (Page 120)

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Guardian Co-Deposition Controller Operating Manual
5.3 Sensor Maintenance
The only maintenance required for the sensor is periodic cleaning, and occasional
filament replacement (782-530-015 for discontinued 782-900-029 and
782-900-052 Sensor and Feedthrough Assemblies) or emitter assembly
(016-201-G1 for all 016-600-Gxx and 016-601-Gxx Sensor and Feedthrough
Assemblies), see
Figure 5-1 and Figure 5-2 . Maintenance is most easily done by
removing the sensor assembly from the vacuum system and working with it on a
clean bench.
Figure 5-1 016-601-Gxx Gas Compensating Sensor (feedthrough and cables not shown)
5.3.1 Sensor Cleaning
Aluminum foil (may not be suitable for use with Se) or other shielding will minimize
build-up of material on sensor surfaces, but some accumulation is inevitable. You
may use the same safe cleaning techniques that you would use to clean any other
sensitive devices in your vacuum system. The sensor is constructed of
vacuum-compatible materials that may be cleaned using alcohol or other
vacuum-friendly solvents.
Most Guardian sensor parts can be replaced in the field. For assistance, refer to
section 5.1, How To Contact Customer Support, on page 5-1 . In extreme cases,
the entire sensor might need to be replaced. Do not return your sensor/feedthrough
to INFICON for cleaning. We cannot establish cleaning facilities for all the materials
used by all our customers, and protect our employees and the environment from
unknown contaminants. Refer to
section 5.2, Returning Your Instrument to
INFICON, on page 5-1 .
Flux Sensor
Gas Sensor