INFICON Guardian EIES Controller - Manual (Page 20)

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Guardian Co-Deposition Controller Operating Manual
Figure 1-7 EIES Software
1.6 Quartz Crystal Monitor
In the EIES system, rate is proportional to light intensity, measured as detector
current. To calibrate the detector current to actual rate, an optional quartz crystal
monitor (QCM) is available.
The EIES system uses the INFICON SQM-242 ™ PCI card or Q-pod ™ Transducer
for QCM calibration of the EIES detector(s). QCM calibration can be initiated by the
user, or automatically at regular intervals during deposition. Control of a source is
also possible with a QCM input.
A separate Operating Manual covers installation of the SQM-242 or Q-pod, and
hook up of the quartz sensors.
1.7 Analog Measurements
The INFICON SAM-242 ™ analog input card measures four 0 to +/-10 V (dc)
signals. The SAM-242 card can be used to measure process parameters, such as
temperature and pressure, to control those process variables. The SAM-242 card
is an add-on for the SQM card and is not a stand-alone card.
The SAM-242 card is also installed in the computer running the EIES software.
Installation is covered in the SQM-242 Operating Manual.