INFICON Guardian EIES Controller - Manual (Page 131)

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Guardian Co-Deposition Controller Operating Manual
6.3.3 Tooling Factor
Tooling Factor adjusts for the difference in material deposited on the quartz sensor
versus the substrate. Tooling may be less than or greater than 100% as shown in
Figure 6-5 .
Figure 6-5 Tooling Value
1 Place your substrate and a new quartz sensor in their normal position.
2 Set Tooling to an approximate value; Density as determined above;
Z-Ratio =1.
3 Deposit approximately 1000 to 5000 Å of material.
4 Use a profilometer or interferometer to measure the substrate's film thickness.
5 The correct Tooling Factor is calculated by:
[11]
[12]
where:
U
q
= 32 Gpa
Substrate
Substrate
Tooling
Over 100%
Tooling
Under 100%
Tooling
Actual
Tooling
Approx
Thickness
Actual
Thickness
QCM
------------------------------------------  =
Z D
q
* U
q
  D
m
* U
m
    
1 2 
=