INFICON Guardian EIES Controller - Manual (Page 15)

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Guardian Co-Deposition Controller Operating Manual
Chapter 1
Introduction and Specifications
1.1 Introduction
The EIES-IV Guardian uses Electron Impact Emission Spectroscopy (EIES) to
control vacuum deposition of thin films.
In EIES, the material being deposited is energized by a thermionic emitter, which
creates optical emission spectra. An optical filter passes a characteristic
wavelength of the spectra to a detector, which measures the intensity of the
emission. The measured intensity is fed to a PID control loop, which generates a
control signal for the material's evaporation power supply. By proper filter selection,
multiple detectors can control deposition of multiple materials simultaneously.
The EIES-IV Guardian consists of five basic elements: controller, sensor(s),
detector(s), software, and an optional quartz crystal monitor. A four channel, two
sensor system is shown in
Figure 1-1 . Actual installation must consider source to
sensor alignment requirements, see section 4.2.1, Sensor Position, on page 4-3 .
Figure 1-1 Four Channel Two Sensor System
CH
4
CH
3
CH
2
CH
1
SOURCE 1
POWER SUPPLY
SOURCE 2
POWER SUPPLY
SOURCE 3
POWER SUPPLY
SOURCE 4
POWER SUPPLY
TO QUARTZ
CRYSTAL MONITOR
OPTIONAL QCM SENSOR
FOR CALIBRATION
EIES SENSOR 2
D3
D4
S2
D3
D4
S2
EIES SENSOR 1
GUARDIAN
CONTROLLER
PC
FIBER OPTIC
BEAM SPLITTER
DETECTORS
& FILTERS