INFICON Guardian EIES Controller - Manual (Page 53)

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Guardian Co-Deposition Controller Operating Manual
Chapter 3
EIES Software
3.1 Introduction
The EIES-IV Guardian Windows program is a turnkey deposition control program
for the EIES Guardian controller. The program uses ASCII commands to
communicate with the Guardian controller. The EIES-IV Guardian software is a
powerful PC-based thin film deposition controller that can:
 Measure up to eight materials simultaneously.
 Operate two standard or gas compensating (GC) sensors.
 Control up to eight deposition sources simultaneously.
 Calibrate EIES sensors against quartz crystal sensors (SQM-242 or Q-pod
option).
 Control analog variables such as temperature and pressure (SAM-242 option).
 Store up to 25 processes and 250 layers on disk.
 Graph, and log deposition data to disk, for process documentation and
analysis.
The current version 4.11 EIES-IV Guardian software is compatible only with version
4.x firmware and vice versa. Version 5.11 software only allows 2 mA operation and
is otherwise identical to version 4.11. Firmware versions prior to 4.x are compatible
with version 2.x EIES-IV Guardian software. The controller firmware is shown on
the instrument label affixed to the controller side panel. Earlier versions of the
controller may not have this label.
NOTE: If parameters are sent to the Guardian via external communications using
commands as described at section 7.3, Guardian Controller Direct
Communications, on page 7-8 , the new parameters will not be updated on
the EIES-IV Guardian software screens.
NOTE: New parameters sent to the Guardian via the ActiveX interface described
at section 7.2, ActiveX (COM) Interface, on page 7-1 , will be shown after
the relevant screen is closed and reopened.
A typical deposition cycle for a thin film can be broken into three distinct phases:
pre-conditioning (ramp/soak), deposition, and post-conditioning (idle).