INFICON Guardian EIES Controller - Manual (Page 63)

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Guardian Co-Deposition Controller Operating Manual
Thick(ness): The deposited thickness measured by each QCM sensor.
Zero: Click to zero the measured thickness, or Shift-click to zero all thickness.
Normally handled automatically by the EIES software when a new layer begins.
Frequency: The measured frequency of each QCM sensor. A negative value
indicates a sensor failure. A QCM requires a density, Z-Ratio, and tooling factor to
properly display rate and thickness. However, frequency is always displayed.
During deposition, the frequency will decrease. With no deposition the frequency
reading should be relatively stable.
Life%: The estimated percent life remaining on the crystal based on the spread
between the Max. (typically 6.0 MHz) and Min (typically 5.0 MHz) frequency range
values set for the Frequency.
SAM-242: The measured volts DC on an SAM-242 analog measurement card.
3.3.6 Menu
The menu along the top of the main screen provides access to functions for
building deposition processes, configuring the hardware for your vacuum system,
and data display.
The following sections detail the functions of each menu selection. For an overview
of program operation, click each menu selection, then read the corresponding
section in this chapter to understand the concepts involved.
Once you have worked through all menu items, go back to Chapter 2, Quick Start ,
and build the sample process for a better operational understanding.
3.4 File Menu
NOTE: The current process must be stopped for the File menu to be available.
3.4.1 File >> Open Process
Used to select a process from a list of all processes in the current database. If the
process selected is different than the current process, you are prompted to confirm
the change.
3.4.2 File >> Open and Save Database
Open Database: Selects a database of processes to be used for deposition.
A single process database holds 25 processes. However, the number of process
database files is unlimited.