INFICON Guardian EIES Controller - Manual (Page 19)

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Guardian Co-Deposition Controller Operating Manual
1.4 EIES Detector
The EIES detector module's photomultiplier tube (PMT) measures the emission
intensity of a characteristic wavelength of the deposited material.
For detecting a single material, an optical filter and detector module can be
attached directly to the viewport. See
Figure 1-6 .
Figure 1-6 EIES Detector
For multiple materials, a fiber optic beam splitter is attached to the viewport. The
split signal is then fed to multiple detectors. Splitting the signal reduces its intensity.
Each detector is fitted with a filter specific to the material it measures.
1.5 EIES Software
The EIES software provides the user interface, see Figure 1-7 , for operating the
EIES-IV Guardian system. The program provides all of the functions required for
an eight sensor, eight output, multi-layer co-deposition controller. Process settings,
numeric data, and graphs can be displayed during all phases of deposition.
The EIES software stores process recipes in a Microsoft ® Access ® compatible
database. Process data is logged to disk in comma-delimited format for easy import
into spreadsheet and graphing programs, such as Microsoft Excel
®
.
Chapter 3 details EIES software functions.
Filter
Detector
Sensor
Viewport