2 single-detector systems, 3 multiple-detector systems, Section 4.3.2, single-detector systems, on – INFICON Guardian EIES Controller User Manual
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Guardian Co-Deposition Controller Operating Manual
4.3.2 Single-Detector Systems
For single-material thin film systems, only one detector is needed and it can be
mounted directly to the feedthrough as shown below.
Figure 4-7 Single Sensor Direct Mounting
1
Thread the 070-1622 Lens Tube into the 782-900-030 PMT Detector.
2
Insert the 782-900-035-xxx optical filter into the lens tube with the arrow
pointing to the PMT Detector and secure the filter with the 070-1620 Retaining
Ring supplied with the lens tube. Tighten the retaining ring using the 070-1628
tool supplied with the Guardian Ship Kit 782-703-G1.
3
Thread the completed assembly onto the Sensor feedthrough.
The feedthrough/viewport assembly can support the weight of one detector
mounted directly on the flange. If an extension is required to clear obstructions,
additional support of the detector is required.
4.3.3 Multiple-Detector Systems
When multiple materials are being deposited, one detector is typically required for
each material. Each detector is fitted with a different optical filter, chosen to pass
the specific emission wavelength characteristic of that material.
One solution for two-material systems, is to use a second sensor/feedthrough, and
mount the second detector directly on that feedthrough (as in a one-detector
system). This configuration achieves the best possible signal/noise ratio. However,
the second sensor adds cost and complexity to the in-vacuum mounting and
fixturing.
The alternative is to split the optical signal into several beams, see
and
, which are directed into separate detectors. The beam can be
split using traditional optical or fiber-optic beam splitters. Part number for a 1:2
Fiber Optic Beam Splitter, 400 mm long, is 782-900-034-2-400. Part number for a
1:3 Fiber Optic Beam Splitter, 400 mm long, is 782-900-034. In both cases, optical
Retaining Ring
C70-1620
PM
Detector Assy
Lens Tube
070-1622
Optical
Filter
Sensor