INFICON Guardian EIES Controller - Manual (Page 75)

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Guardian Co-Deposition Controller Operating Manual
3.6.5.2 Condition Grid
Ramp1 Power: The power level desired at the end of the Ramp 1 phase, in % of
full scale.
Ramp1 Time: The time to ramp linearly from the initial power to the Ramp 1 Power.
If multiple channels have preconditioning programmed, the start of Ramp1 may be
delayed so that the Soak2 phase for all channels ends at the same time.
Soak1 Time: The time the output remains at Ramp 1 Power. At the end of Soak 1
Time, the Ramp 2 phase starts.
Ramp2 Power: The power level desired at the end of the Ramp 2 phase, in % of
full scale.
Ramp2 Time: The time to ramp linearly from Ramp1 Power to Ramp2 Power.
Soak2 Time: The time the output remains at the Ramp 2 power level. At the end
of Soak 2, all channels will enter the Shutter Delay phase.
Idle Power: Idle power usually holds the material at a state that is ready for
deposition, typically the same as Ramp 2 power if the material is to be used in a
subsequent layer.
Idle Ramp: The time to ramp linearly from deposition power to Idle Power.