INFICON Guardian EIES Controller - Manual (Page 133)

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Guardian Co-Deposition Controller Operating Manual
On the Edit Layer dialog box, adjust the PMT voltage until the % Current reading
on the Edit System dialog box shows 50% to 70%. Typical PMT voltage values are
500 V to 700 V. The 50% to 70% value may seem low, but some headroom may
be necessary when other materials are being codeposited.
6.4.3 Zero Calibration
The EIES detector may read a residual gas signal, even when no deposition is
occurring. Allow a one hour warm-up for the PMT Detector module.
To remove this error term, in the EIES software create a layer that uses the desired
material (film). Show the channel's Edit Layer dialog box, Film Cal. tab. Verify that
the film's User Multiplier setting is 1 and User Offset is 0. Also verify that the Cal
Gain setting is 1 and the Cal Zero setting is 0. This assures that the detector
reading displayed is detector current in nA.
With the EIES sensor enabled, but with no deposition, observe the channel
readings. Enter the reading into the Cal. Zero field of the Edit Layer dialog box and
press Enter. The channel reading will now show zero.
6.4.4 Gain Calibration - Test Run
Gain calibration matches the EIES detector's relative rate/thickness measurement
to a known rate/thickness measurement. This can be done by completing a trial
deposition on a substrate whose thickness can be measured by some other
means, such as a QCM, interferometer, profilometer, or weight. Allow a one hour
warm-up for optimum stability.
Record the EIES thickness reading at the end of the deposition and correct the
value by entering a Cal Gain:
[13]
CAUTION
This method of EIES gain calibration is both
time-consuming and prone to error.
Cal. Gain
Measured Thickness
EIES Total
------------------------------------------------- =