beautypg.com

7 what is the effect of flow variation – INFICON Composer Elite Gas Concentration Monitor User Manual

Page 61

background image

4 - 5

PN

07

4-

56

6-

P1

B

Composer Elite Operating Manual

4.1.7 What is the Effect of Flow Variation?

There is virtually no flow induced effect on concentration measurement in the
Composer Elite System except at the highest flow rates, see

Figure 4-3

, the

pressure drop across the Acoustic Sensor is about 12 Torr [1.60 kPa] at 2000 sccm
for the Standard sensor or 6 Torr [0.80 kPa] for the High Flow sensor.

HINT: Large variations in flow rate will cause a shift in the zero concentration

point. To minimize zero shift due to flow rate change, carefully set the inlet
tubing heater temperature (Temperature Setpoint 2). The default value for
Temperature Setpoint 2 is 3 degrees higher than Temperature Setpoint 1.
Adjusting the Temperature Setpoint 2 value slightly might be necessary
depending on your process requirements.

Figure 4-3 Effect of flow on apparent concentration

4.1.8 How Does This Instrumental Method Differ from Measuring the Speed

of Sound by Time of Flight?

The use of a low frequency Resonant Chamber has significant advantages over
Time of Flight (TOF) methods. It allows the constructive build up of energy within
the Resonant Chamber. Plus, sound transmission in hydrogen at low frequency is
more efficient than at high frequency. This enhances the instrument’s ability to
measure concentration in hydrogen mixtures at lower pressures. Finally, the
careful intelligent manipulation of the applied frequency around the resonant
amplitude peak allows even greater precision in the determination of the speed of

3935

3925

3915

3905

3895

100

200

300

400

500

600

700

Flow (SCCM)

Frequency (Hz)

H2- 300 Torr

H2- 600 Torr

H2- 150 Torr