INFICON Composer Elite Gas Concentration Monitor - Manual (Page 148)

B - 2
PN
07
4-
56
6-
P1
B
Composer Elite Operating Manual
nitrogen N
2
28.010 1.399
oxygen O
2
32.000 1.395
phosphoryl trichloride POCl
3
153.330 1.168
silicon chloride hydride SiHCl3 135.450 1.123
silicon fluorine hydrogen SiFH
3
50.100 1.213
silicon hexafluride SiF
6
142.080 1.127
silicon tetrachloride SiCl
4
169.900 1.101
silicon tetrabromide SiBr
4
347.702 1.094
tetraethyl orthosilicate TEOS 208.260 1.200
tetrafluoroethane R134a 102.000 1.120
tetrakis(diethylamino)titanium TDEAT 336.100 1.200
tetrakis(dimethylamido)titanium TDMAT 224.000 1.200
trichlorosilane SiHCl
3
135.450 1.123
triethylgallium TeGa 156.930 1.120
trimethylaluminum TMAl 72.090 1.230
trimethylgallium TMGa 114.830 1.103
trimethylindium TMIn 159.93 1.120
tungsten hexafluoride WF
6
297.830 1.075
Table B-1 Material table (continued)
Gas Name Formula Molecular
Weight Gamma
Factor