INFICON Composer Elite Gas Concentration Monitor - Manual (Page 123)

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Composer Elite Operating Manual
Chapter 7
Maintenance
7.1 Scheduled Maintenance
Composer Elite System components do not have wear or anticipated failure
characteristics. Therefore, no scheduled maintenance on any components in the
Composer Elite System is required.
7.2 Leak Test Procedures
WARNING
Many of the gases used for film growth are toxic at very
low exposure levels.
Although the Acoustic Sensor was thoroughly leak
tested at the factory, periodic leak testing of the Acoustic
Sensor is recommended for safety.
The Composer Elite Acoustic Sensor is constructed in a manner which provides
both primary and secondary containment of process gases. Perform the leak test
procedures in
section 7.2 to verify the leak integrity of the Acoustic Sensor.
7.2.1 Leak Testing the Primary (Resonant) Chamber
The following procedure checks for leaks of the diaphragm and diaphragm seals of
the Composer Elite Acoustic Sensor.
WARNING
If the Acoustic Sensor has been exposed to toxic,
pyrophoric, or otherwise dangerous chemicals, make
certain the Acoustic Sensor has been thoroughly purged
of these chemicals before performing this leak test.
CAUTION
Do not begin this test until the Acoustic Sensor’s
temperature drops below 30°C.