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INFICON Composer Elite Gas Concentration Monitor User Manual

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9 - 3

PN

07

4-

56

6-

P1

B

Composer Elite Operating Manual

Where

f

and

f

2

are the resonant frequencies of the mixture and pure gas,

respectively.

Combining 12, 13 and 14:

[15]

Simplifying leads to,

[16]

where,

[17]

[18]

[19]

Since the equation is quadratic, the solutions are of the following form,

[20]

Since

x1,2

represents the Mole Fraction of the gases, acceptable solutions are,

[21]

The general result of this analysis is that the technique is most sensitive to
composition changes when the Molecular Weight difference between the carrier
gas and the precursor is the greatest. See

Figure 9-1

.

Figure 9-1 Mole fraction of trimethylindium in H

2

vs. instrument’s frequency

 1

m 1

x

+

g h

 1 h

x 1 g

g h

+

------------------------------------------------ h

+

=

Ax

2

Bx C

+

+

0

=

A

 m 1

 1 g

=

B

m g h

  1 2g

h

+

 h 1 g

+

=

C

 1

 g h

=

x

1,2

B

B

2

4AC

2A

-------------------------------------------

=

0 x

1,2

1

Frequency (Hz)

Mole-Fraction (%)

5

4

3

0

2

1

2000

2500

3000

3500

1500

4000