Figure c.2: firmware rom label, Operation, Installation – INFICON STM-100/MF Thin Film Deposition Monitor User Manual
Page 98: Figure c.3: shmx-4 back panel, Films sensor
Sycon 520-001
STM100 VI6
Figure C.2: Firmware ROM Label
To access the individual sensors use the multiple film capability of the
STM-100 / MF. Selecting film 1 from the front panel, or by external computer
control, will select sensor 1. By selecting different films the active sensor will
change according to the following table.
Films
Sensor
1, 5, 9
1
2, 6
2
3, 7
3
4, 8
4
Sensor and Controller connections to the SHMX-4 are made on the back
panel, shown below.
240VAC FUSE 1/8 AMP SB
120VAC FUSE 1/4 AMP SB
4 Sensor Head Multiplexer
SHMX-4
POWER
instruments
S4
S3
S2
S1
Control
Unit
GND
CHANNEL
SELECT
RELAY
OUTPUT
Figure C.3: SHMX-4 Back Panel
The BNC connectors labeled S1 through S4 are the individual Crystal
sensor connections. The connection to the controlling STM-100 is made via 2
connection cables. The first is the control cable which goes between the
Channel Select 9 Pin D connector on the SHMX-4 to the Input / Output 15 Pin
D connector on the STM-100. The control cable is shown below. The Sensor
BNC on the STM-100 and the SHMX's Control Unit BNC are connected.
Operation
Installation
SHMX-4 Operation
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