INFICON STM-100/MF Thin Film Deposition Monitor - Manual (Page 51)

Material Reference Table
Material Symbol Bulk Density Z-Factor
Gm/cm 3
Aluminum Al 2.73 1.080
Aluminum Oxide Al
2
O
3
3.97 --------
Antimony Sb 6.62 0.768
Arsenic As 5.73 0.966
Barium Ba 3.50 2.100
Beryllium Be 1.85 0.543
Bismuth Bi 9.80 0.790
Bismuth Oxide Bi
2
O
3
8.90 --------
Boron B 2.54 0.389
Cadmium Cd 8.64 0.682
Cadmium Selenide CdSe 5.81 --------
Cadmium Sulfide CdS 4.83 1.020
Cadmium Telluride CdTe 5.85 0.980
Calcium Ca 1.55 2.620
Calcium Fluoride CaF
2
3.18 0.775
Carbon (Diamond) C 3.52 0.220
Carbon (Graphite) C 2.25 3.260
Cerium (III) Fluoride CeF
3
6.16 --------
Cerium (IV) Oxide CeO
2
7.13 --------
Chromium Cr 7.20 0.305
Chromium (III) Oxide Cr
2
O
3
5.21 --------
Cobalt Co 8.71 0.343
Copper Cu 8.93 0.437
Copper (I) Sulfide (A) Cu
2
S (A) 5.60 0.690
Copper (I) Sulfide (B) Cu
2
S (B) 5.80 0.670
Copper (III) Sulfide CuS 4.60 0.820
Dysprosium Dy 8.54 0.600
Erbium Er 9.05 0.740
Gadolinium Gd 7.89 0.670
Gallium Ga 5.93 0.593
Gallium Arsenide GaAs 5.31 1.590
Germanium Ge 5.35 0.516
Gold Au 19.3 0.381
Hafnium Hf 13.1 0.360
Hafnium Oxide HfO
2
9.63 --------
Holnium Ho 8.80 0.580
Indium In 7.30 0.841
Table 4.1: Common Material Reference Table
SECTION 4.3
Bulk Density and
Z-Factor Values
Aluminum through
Indium
Calibration and Theory Page 4 - 4