INFICON STM-100/MF Thin Film Deposition Monitor - Manual (Page 8)

D ENSITY ........................................................................................................................................................... 4-2
Z-F ACTOR D ETERMINATION ............................................................................................................................................ 4-2
Z-F ACTOR ......................................................................................................................................................... 4-2
T OOLING D ETERMINATION .............................................................................................................................................. 4-3
SECTION 4.3 ........................................................................................................................................................ 4-4
M ATERIAL R EFERENCE T ABLE ........................................................................................................................................ 4-4
B ULK D ENSITY AND Z-F ACTOR V ALUES ................................................................................................................ 4-4
A LUMINUM THROUGH I NDIUM ............................................................................................................................... 4-4
I NDIUM I NTIMONIDE THROUGH T ANTALUM ............................................................................................................. 4-5
T ELURIUM THROUGH Z IRCONIUM O XIDE ................................................................................................................ 4-6
COMPUTER INTERFACING .......................................................................................................................... 5-1
RS-232 INTERFACE .................................................................................................................................................. 5-1
SECTION 5.1 ....................................................................................................................................................... 5-1
RS-232 D ESCRIPTION ....................................................................................................................................... 5-1
BAUD RATES AND CABLING ...................................................................................................................................... 5-1
M AKING AN RS-232 C ABLE ................................................................................................................................ 5-2
C OMMUNICATION D EMO D ISK .............................................................................................................................. 5-2
S ETTING B AUD R ATES ........................................................................................................................................ 5-2
S YCON P ROTOCOL ........................................................................................................................................................ 5-2
SECTION 5.2 ....................................................................................................................................................... 5-2
M ESSAGE F ORMAT ............................................................................................................................................. 5-3
B ASIC D RIVER R OUTINE ..................................................................................................................................... 5-4
SECS-II P ROTOCOL ...................................................................................................................................................... 5-5
SECTION 5.3 ....................................................................................................................................................... 5-5
SECS-II A DDRESSING ....................................................................................................................................... 5-5
SECS-II P ROTOCOL .......................................................................................................................................... 5-5
D OCUMENTATION R EQUIREMENTS ....................................................................................................................... 5-5
G ENERAL I NFORMATION ...................................................................................................................................... 5-5
M ESSAGE S UMMARY .......................................................................................................................................... 5-5
SECS-II M ESSAGES .......................................................................................................................................... 5-6
M ESSAGE D ETAILS ............................................................................................................................................. 5-6
IEEE-488 INTERFACE OPTION ................................................................................................................................. 5-6
SECTION 5.4 ....................................................................................................................................................... 5-6
COMMANDS .............................................................................................................................................................. 5-7
SECTION 5.5 ....................................................................................................................................................... 5-7
RESPONSE FORMAT ................................................................................................................................................ 5-7
C OMMAND L IST F OR STM-100 / MF ................................................................................................................... 5-8
DETAILED COMMAND DESCRIPTION ..................................................................................................................... 5-8
SECTION 5.6 ....................................................................................................................................................... 5-8
S OFTWARE V ERSION C ODE ................................................................................................................................ 5-8
S HUTTER R ELAY C ONTROL ................................................................................................................................. 5-9
Z ERO T HICKNESS AND T IMER .............................................................................................................................. 5-9
Z ERO T HICKNESS ............................................................................................................................................... 5-9
Z ERO T IMER ...................................................................................................................................................... 5-9
S ET THE D ENSITY P ARAMETER ............................................................................................................................ 5-9
S ET THE Z-F ACTOR P ARAMETER ......................................................................................................................... 5-9
S ET THE E ND T HICKNESS ................................................................................................................................... 5-9
S ET THE S ETPOINT R ELAY T HICKNESS ................................................................................................................. 5-9
S ET THE T IMER R ELAY P ARAMETER ..................................................................................................................... 5-10
S ET THE T OOLING F ACTOR P ARAMETER ............................................................................................................... 5-10
T URN THE T EST M ODE O N /O FF ........................................................................................................................... 5-10
A CKNOWLEDGE THE S TATUS OF N ON -V OLITILE M EMORY ....................................................................................... 5-10
G ET THE C RYSTAL F AIL S TATUS .......................................................................................................................... 5-10
G ET THE S TATUS OF THE S ETPOINT T IMER R ELAY ................................................................................................. 5-10
G ET THE S TATUS OF THE S ETPOINT T HICKNESS R ELAY ......................................................................................... 5-10
G ET THE S TATUS OF THE E ND T HICKNESS R ELAY ................................................................................................. 5-11
G ET THE R EMOTE I NPUT S TATUS ........................................................................................................................ 5-11
G ET THE C ONFIGURATION S WITCH S TATUS .......................................................................................................... 5-11
G ET THE T HICKNESS V ALUE ................................................................................................................................ 5-11
G ET THE R ATE V ALUE ........................................................................................................................................ 5-11
G ET THE S ENSOR F REQUENCY ............................................................................................................................ 5-11
G ET THE C RYSTAL L IFE V ALUE ............................................................................................................................ 5-11
G ET THE T IMER V ALUE ....................................................................................................................................... 5-12
G ET THE S HUTTER C LOSE E VENT T HICKNESS L OG ............................................................................................... 5-12
G ET THE S HUTTER CLOSE T IME L OG .................................................................................................................... 5-12
G ET THE L OG E VENT R ATE ................................................................................................................................. 5-12
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