INFICON STM-100/MF Thin Film Deposition Monitor - Manual (Page 69)

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Command: j
Argument: [1 thru 9] [=0.500 .. 99.99] l [?]
Description: Sets the density parameter for the film specified in the first argument. If a "?" is
sent as a parameter, the current density value is returned. Example: command
j6=0.75 sets the density for film 6 to 0.750 gm/cc. The units are gm/cc.
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Command: k
Argument:: [1 thru 9] [=0.100 .. 99.99] l [?]
Description: Sets the material Z-Factor for the film specified in the first argument. If a "?" is the
parameter, the current Z-Factor is returned. Example: command k5=0.5 sets the Z-
Factor for film 5 to 0.5. Dimensionless number.
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Command: l
Argument: [1 thru 9] [=0 .. 9999000] l [?]
Description: Sets the end thickness for the film specified in the first argument. While any
resolution number can be programmed (up to 7 digits), the number that is accepted
by the STM-100 / MF will be within the display range. This is limited to a total of 4
digits. The units are Angstroms.
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Command: m
Argument: [1 thru 9] [=0 .. 9999000] l [?]
Description: Sets the Set Point Relay thickness limit for the film specified in the first argument.
See the description for the G command.
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Command: n
Argument: [1 thru 9] [=00:00 .. 99:59] l [?]
Description: Set the setpoint timer relay for the film specified in the first argument. The format is
"Minutes: Seconds". A "?" will return the current value.
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Command: o
Argument: [1 thru 9] [=10.0 .. 399] l [?]
Description: Set the tooling factor parameter for the film specified in the first argument. A "?" will
return the current value. The units are in percent.
Multi-Film Density
Parameter
Multi-Film Z-Factor
Parameter
Multi-Film End
Thickness Parameter
Multi-Film Set Point
relay Thickness
Parameter
Multi-Film Set Point
Timer Relay Parameter
Multi-Film Tooling
Factor Parameter
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