INFICON STM-100/MF Thin Film Deposition Monitor - Manual (Page 60)

SECS-II Protocol
By setting switch number 5 (on the configuration DIP switches) to the ON
position, the protocol for the RS-232 interface will be SECS-II. The SECS-II
protocol requires that each communicating mode be assigned a unique station
address. This is similar in concept to the LISTEN and TALK addresses used by
IEEE-488. Although the RS-232 link used by the SECS-II standard is point to
point and does not require station addressing for message routing, station
addressing is used to allow for a "networked" approach to information transfer.
This requires the address switches 8 through 12 be set and known by the host
software. If either the IEEE-488 or BITBUS option is installed, the same address
switches are used for it. Select an address that is compatible with both of these
interfaces.
The SECS-II protocol has defined within it several parameters. The
STM-100 / MF fixes these parameters to the following definitions:
T1, T2, T3 fixed at approximately 3 seconds
RTY retry count fixed at 3
M/S set to Master in the STM-100 / MF
For all other aspects of the SECS implementation, refer to SEMI publications
E4-80 (SECS-I) and E5-85 (SECS-II).
The SECS-II standard (ES-85 Section 6.2) defines a standard form for
SECS-II-compatible equipment manufacturers to use when describing the exact
compliance of their equipment. The specific information that is required is detailed
below.
a) Manufacturer and Product number
Sycon Instruments, Inc.
STM-100 / MF
b) General Description of Equipment Function Thickness/Rate deposition
monitor using quartz crystal
technology
c) Intended Function of Interface To allow for queries of unit
status and data, and to alter
and control status as needed
d) Software Revision Code This software responds to
SECS S1,F1 as version B2
e) Changes from Previous Versions: This is the original SECS
compatible version
The following is a list of messages received and understood by the
STM-100 / MF.
Message Recd. Description Reply Sent Desc
S1 ,F1, Are you there request S1, F2 On Line
S64, F65 STM comm packet S64, F66 STM Resp.
The STM-100 / MF comm packet and response is contained under the
category of COMMANDS (Section 5.5). Note that all commands and responses
are in ASCII form.
SECTION 5.3
SECS-II Addressing
SECS-II Protocol
Documentation
Requirements
General Information
Message Summary
SECS-II Messages
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