INFICON STM-100/MF Thin Film Deposition Monitor - Manual (Page 38)

3. SHUTTER RELAY - This relay is intended to provide control of a deposition
system source shutter. The front panel and remote input OPEN and
CLOSE SHUTTER functions directly control this relay. The contacts
are closed when the source shutter is intended to be open. The LCD
legend for this relay is (SHUTTER). The relay status is also
controlled by a END THICKNESS event. This event is controlled by
the END THICKNESS setpoint parameter. If the shutter is open at
the time of this event it will automatically close. The (SHUTTER)
legend will turn off and the (END THICK) legend will become visible,
indicating the shutter was closed by the END THICKNESS event.
4. THICKNESS SETPOINT - This relay provides a contact closure whenever the
accumulated thickness display value equals or exceeds the thickness
setpoint parameter value. This relay function is disabled with a
parameter value of zero. The LCD legend for this relay is (SP
THICK).
REMOTE INPUTS
The STM-100 / MF is standard equipped with four remote input functions.
These inputs are intended to be activated with a contact closure to ground but may
also be controlled with TTL level signals. All remote inputs are leading edge
detected and can thus remain activated indefinitely. To cause the event to happen
again the input must be removed for a minimum of 200 milliseconds and then can
be re-applied. The four available input commands are:
1. REMOTE SHUTTER OPEN - Functionally identical to front panel SHUTTER
OPEN button. Activating this input will close the contacts of the
SHUTTER RELAY.
2. REMOTE SHUTTER CLOSE - Functionally identical to front panel shutter close
button. Activating this input will open the contacts of the SHUTTER
RELAY.
3. REMOTE THICKNESS ZERO - Sets the accumulated thickness display to
zero. Does not zero the elapsed time timer.
4. REMOTE TIMER ZERO - Re-initializes the elapsed time timer. Does not zero
accumulated thickness.
SPECIFICATIONS
ACTIVATION ................................. Contact closure to gnd or TTL low
INPUT IMPEDANCE ..................... 2700 ohms
OPEN CIRCUIT VOLTAGE ........... 3.5V typical, 5V max.
MAXIMUM ON VOLTAGE ............. 0.6 volts
MAXIMUM SINK CURRENT ......... 2 mA (1 TTL LOAD)
Shutter
Thickness Setpoint
Remote Inputs
Shutter Relays
Thickness Zero Input
Timer Zero Input
Remote Input
Specifications
INSTALLATION Page 3 - 4