INFICON STM-100/MF Thin Film Deposition Monitor - Manual (Page 7)

BEEPER ..................................................................................................................................................................... 2-12
SECTION 2.7 ....................................................................................................................................................... 2-12
D ISABLING THE B EEPER ...................................................................................................................................... 2-12
INSTALLATION .............................................................................................................................................. 3-1
E LECTRICAL C ONNECTIONS AND D ESCRIPTIONS ............................................................................................................... 3-1
SECTION 3.1 ....................................................................................................................................................... 3-1
SECTION 3.2 ....................................................................................................................................................... 3-1
L INE P OWER W ARNING ...................................................................................................................................... 3-1
L INE V OLTAGES ................................................................................................................................................. 3-1
GROUND ................................................................................................................................................................... 3-2
SECTION 3.3 ....................................................................................................................................................... 3-2
G ROUNDING ...................................................................................................................................................... 3-2
C ONNECTOR S HIELDING ..................................................................................................................................... 3-2
I/O INTERFACE CONNECTION ................................................................................................................................. 3-3
SECTION 3.4 ....................................................................................................................................................... 3-3
I/O C ONNECTOR ................................................................................................................................................ 3-3
RELAYS .......................................................................................................................................................... 3-3
INPUTS ........................................................................................................................................................... 3-3
RELAY OUTPUTS ...................................................................................................................................................... 3-3
R ELAY O UTPUTS ................................................................................................................................................ 3-3
C RYSTAL F AIL ................................................................................................................................................... 3-3
E LAPSED T IMER ................................................................................................................................................. 3-3
S HUTTER .......................................................................................................................................................... 3-3
T HICKNESS S ETPOINT ........................................................................................................................................ 3-4
REMOTE INPUTS ...................................................................................................................................................... 3-4
R EMOTE I NPUTS ................................................................................................................................................ 3-4
S HUTTER R ELAYS .............................................................................................................................................. 3-4
T HICKNESS Z ERO I NPUT ..................................................................................................................................... 3-4
T IMER Z ERO I NPUT ............................................................................................................................................. 3-4
R EMOTE I NPUT S PECIFICATIONS .......................................................................................................................... 3-4
SENSOR CONNECTION............................................................................................................................................ 3-4
SECTION 3.5 ....................................................................................................................................................... 3-4
O SCILLATOR C ONNECTION .................................................................................................................................. 3-4
ANALOG RECORDER INTERFACE .......................................................................................................................... 3-5
SECTION 3.6 ....................................................................................................................................................... 3-5
A NALOG O UTPUT S PECIFICATIONS ....................................................................................................................... 3-5
RECORDER CALIBRATION ........................................................................................................................... 3-5
R ECORDER O UTPUTS ......................................................................................................................................... 3-6
RS-232 SERIAL COMMUNICATIONS INTERFACE ................................................................................................... 3-6
SECTION 3.7 ....................................................................................................................................................... 3-6
RS-232 C ONNECTIONS ...................................................................................................................................... 3-6
RS-232 CONNECTOR DEFINITIONS ............................................................................................................. 3-7
COMMUNICATIONS OPTIONS ................................................................................................................................. 3-7
SECTION 3.8 ....................................................................................................................................................... 3-7
C OMMUNICATIONS O PTIONS ................................................................................................................................ 3-7
DEPOSITION SYSTEM INSTALLATION .................................................................................................................... 3-8
SECTION 3.9 ....................................................................................................................................................... 3-8
S YSTEM I NSTALLATION ....................................................................................................................................... 3-8
S ENSOR I NSTALLATION ....................................................................................................................................... 3-8
I NSTALLING W ATER L INES .............................................................................................................................................. 3-9
W ATER L INES .................................................................................................................................................... 3-9
VACUUM FEEDTHROUGH ........................................................................................................................................ 3-10
V ACUUM F EEDTHROUGH ..................................................................................................................................... 3-10
ELECTRICAL IN-VACUUM CABLE ............................................................................................................................ 3-10
V ACUUM E LECTRICAL C ONNECTIONS ................................................................................................................... 3-10
B AKEABLE S ENSOR ............................................................................................................................................ 3-10
C ALIBRATION AND T HEORY ................................................................................................................................ 4-1
M EASUREMENT T HEORY ................................................................................................................................................ 4-1
SECTION 4.1 ........................................................................................................................................................ 4-1
E QUATION 1: ..................................................................................................................................................... 4-1
M EASURING P ERIOD ........................................................................................................................................... 4-1
R ATE C OMPUTATION .......................................................................................................................................... 4-1
T HICKNESS R EADING C ALIBRATION ................................................................................................................................. 4-2
SECTION 4.2 ........................................................................................................................................................ 4-2
T HICKNESS ........................................................................................................................................................ 4-2
D ENSITY D ETERMINATION ............................................................................................................................................... 4-2
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