Zero thickness, Zero timer, Set the density parameter – INFICON STM-100/MF Thin Film Deposition Monitor User Manual
Page 64: Set the z-factor parameter, Set the end thickness, Set the setpoint relay thickness, Set the timer relay parameter, Set the tooling factor parameter, Page 5 - 9 computer interfacing
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Command:
C
Parameter:
None
Description:
Zeros only the thickness.
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Command:
D
Parameter:
None
Description:
Zeros only the timer.
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Command:
E
Parameter:
=[0.500 .. 99.99] | [?]
Description:
Sets the density parameter of the currently selected film. If a "?" is sent as a
parameter, the current density value is returned. The units are gm/cc.
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Command:
F
Parameter:
=[0.100 .. 9.999] | [?]
Description:
Sets the material Z-Factor of the currently selected film. If a "?" is the parameter, the
current Z-Factor is returned.
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Command:
G
Parameter:
=[0 .. 9999000] | [?]
Description:
Sets the end thickness of the currently selected film. While any resolution number
can be programmed (up to 7 digits), the number that is accepted by the
STM-100 / MF will be within the display range. This is limited to a total of 4 digits.
The units are Angstroms.
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Command:
H
Parameter:
=[0 .. 9999000] | [?]
Description:
Set the setpoint relay thickness limit of the currently selected film. See the
description for the G command.
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Command:
I
Parameter:
=[00:00 .. 99:59] | [?]
Description:
Set the setpoint timer relay of the currently selected film. The format is
"Minutes:Seconds". A "?" will return the current value.
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Command:
J
Parameter:
=[10.0 .. 399] | [?]
Description:
Set the tooling factor parameter of the currently selected film. A "?" will return the
current value. The units are in percent.
Zero Thickness
Zero Timer
Set the Density
Parameter
Set the Z-Factor
Parameter
Set the End Thickness
Set the Setpoint Relay
Thickness
Set the Timer Relay
Parameter
Set the Tooling Factor
Parameter
Page 5 - 9
COMPUTER INTERFACING