INFICON STM-100/MF Thin Film Deposition Monitor - Manual (Page 52)

Material Symbol Bulk Density Z-Factor
Gm/cm 3
Indium Intimonide InSb 5.76 0.769
Indium Oxide In
2
O
3
7.18 --------
Iridium Ir 22.4 0.129
Iron Fe 7.86 0.349
Lanthanum La 6.17 0.920
Lanthanum Fluoride LaF
3
5.94 --------
Lanthanum Oxide LaO
3
6.51 --------
Lead Pb 11.3 1.130
Lead Sulfide PbS 7.50 0.566
Lithium Li 0.53 5.900
Lithium Fluoride LiF 2.64 0.774
Magnesium Mg 1.74 1.610
Magnesium Fluoride MgF
2
3.00 --------
Magnesium Oxide MgO 3.58 0.411
Manganese Mn 7.20 0.377
Manganese (II) Sulfide MnS 3.99 0.940
Mercury Hg 13.46 0.740
Molybdenum Mo 10.2 0.257
Neodynium Fluoride NdF
3
6.506 --------
Neodynium Oxide Nd
2
O
3
7.24 --------
Nickel Ni 8.91 0.331
Niobium Nb 8.57 0.493
Niobium (V) Oxide Nb
2
O
5
4.47 --------
Palladium Pd 12.0 0.357
Platinum Pt 21.4 0.245
Potassium Chloride KCl 1.98 2.050
Rhenium Re 21.04 0.150
Rhodium Rh 12.41 0.210
Rubidium Rb 1.53 2.540
Samarium Sm 7.54 0.890
Scandium Sc 3.00 0.910
Selenium Se 4.82 0.864
Silicon Si 2.32 0.712
Silicon (II) Oxide SiO 2.13 0.870
Silicon Dioxide SiO
2
2.20 1.070
Silver Ag 10.5 0.529
Silver Bromide AgBr 6.47 1.180
Silver Chloride AgCl 5.56 1.320
Sodium Na 0.97 4.800
Sodium Chloride NaCl 2.17 1.570
Sulfur S 2.07 2.290
Tantalum Ta 16.6 0.262
Tantalum (IV) Oxide Ta
2
O
5
8.20 0.300
Table 4.1: Common Material Reference Table, Continued
Indium Intimonide
through Tantalum
Page 4 - 5 Calibration and Theory