INFICON STM-100/MF Thin Film Deposition Monitor - Manual (Page 50)

life. Measure the substrate and then adjust the STM-100 / MF Z-Factor
parameter until the correct thickness is displayed.
Tooling Determination
Place a substrate in the normal holder location and deposit a film of
approximately 5000 angstroms using either bulk or calibrated density and
Z-Factor values. Make sure that when doing this calibration the tooling is set
to 100%. Measure the substrate film thickness as in the density calibration
method and determine the correct tooling factor value by the following formula:
Tooling % = 100
(Substrate Thickness)
(Displayed Thickness)
×
Substrate
Source
Sensor
TOOLING > 100% TOOLING < 100%
Sensor
Substrate
Source
Figure 4.1: Typical Tooling Factors.
Generally tooling factors will follow the rule depicted by Figure 4.1.
Page 4 - 3 Calibration and Theory