INFICON STM-100/MF Thin Film Deposition Monitor - Manual (Page 17)

SENSOR SPECIFICATIONS
Low Profile P/N 500-042 RIGHT ANGLE P/N 500-088
Figure 1.1: Standard Sensors.
Low Profile and Right Angle sensors, See Appendix B for dimensions and
more detailed drawings of these and other sensor packages.
Maximum Temperature ............................. 175
° C
Water Line and Coax Length ................... 30 inches
Sensor Mounting ...................................... Rear of Body, 4-40 Tapped Holes
FEEDTHROUGH INSTALLATION
Connections .................................... Two Required
Type ................................................ 1/8 inch O.D. Stainless Tubing
Flow Rate ......................................... 0.2 to 0.3 gal/min
Water Temp ..................................... 50 ° C max.
Connections .................................... One Coaxial Line
Type ................................................ Microdot Miniature S-50
Body and Water Lines .................... 304 Stainless
Insulators ........................................ Alumina
Coax Insulator ................................. Teflon
Coax Conductor and Shields ........... Copper/Silver
Braze Material ................................. High Vac Ni/CR/Cu Alloy
Crystal ............................................. Quartz with Gold Electrodes
SENSOR SPARE PARTS
Description SYCON Part Number
Sensor Body (Standard) .................. 550-219
Snap Spring ..................................... 024-002
Sensor Cap ...................................... 550-218
30 inch In-Vacuum Coax Cable ....... 500-024
10 inch In-Vacuum Coax Cable ....... 500-023
Crystals (box of 10) ......................... 500-117
SECTION 1.4
OPERATION
WATER
ELECTRICAL
MATERIALS (IN VAC)
SECTION 1.5
GENERAL INFORMATION Page 1 - 4