INFICON STM-100/MF Thin Film Deposition Monitor - Manual (Page 63)

Parameter Example Comment
Sent Returned
@ None @ STM100C5 Firmware Version and inst. model number
A [@,!,?] A@ Turn shutter relay off
B None B Zeros timer and thickness
C None C Zeros thickness
D None D Zeros timer
E =[0.500 - 99.99],[?] E=1.23 Set current film density to 1.23
F =[0.100 - 9.999],[?] F? 1.234 Returns current film Z factor
G =[0 - 9999999],[?] G=550 Set current film end thickness to 550Å
H =[0 - 9999999],[?] H=10560 Set current film setpoint thickness to 10.56KÅ
I =[00:00 - 99:59],[?] I=15:30 Set current film setpoint timer to 15:30
J =[10.0 - 399],[?] J = 80.1 Set current film tooling to 80.1%
K [@,!,?] K? @ Return test mode status, was off
L None L Acknowledge "a" response
M None M ! Return crystal fail status, was failed
O None O ! Return setpoint timer relay, was closed
P None P @ Return end thickness relay, was open
Q None Q C Return remote inputs, ZERO TIMER,
ZERO THICK active
R None R 193 Return config switch, switches 5,6,12 on
S None S -0001595 Return thickness value -1.595KÅ
T None T (sp)012.4 Return rate, 12.4 Å/s
U None U 5319234 Return sensor freq., 5,319,234Hz
V None V 012.4 Return crystal life, 12.4% left
W None W +12:45 Return timer, 12 min 45 sec counting up
X None X (sp)0000201 Return log thickness, 201 Å
Y None Y +49:21 Return log timer, since THICK ZERO.
Z None Z -012.3 Return log rate, -12.3 Å/sec
a None a A Return RESET Status, true
b None b Set parameters to default values
c [@,!,?] c? ! Query beeper status, returned active
d None Internal use commands
e Mask Internal use commands
f None Internal use commands
g None Internal use commands
h None Internal use commands
i [1-9,?] i5 Sets the current film to number 5.
j [1-9],[0.500 - 99.99]|[?] Sets / queries the selected film density.
k [1-9],[0.100 - 99.99]|[?] Sets / queries the selected film z-factor.
l [1-9],[0 - 9999000]|[?] Sets / queries the selected film End Thickness
m [1-9],[0 - 9999000]|[?] Sets / queries the selected film
set point relay thickness
n [1-9],[00:00 - 99:59]|[?] Sets / queries the selected film timer relay
o [1-9],[10.0 - 399]|[?] Sets / queris selected film tooling factor
Table 5.2: Communication Command Summary.
DETAILED COMMAND DESCRIPTION
_________________________________________________________________________
Command: @
Parameter: None
Description: Returns a string indicating the product model number and the software revision level.
The form is "STM100XY" where X is major (A.B,..) and Y is minor digits (0..9).
_________________________________________________________________________
Command: A
Parameter: [@,!,?]
Description: Turns the shutter relay on and off. A "@" will turn the shutter off and a "!" will turn it
on. The indicator on the LCD will indicate the new state. A "?" will send back "@" or
"!" as the current status.
_________________________________________________________________________
Command: B
Parameter: None
Description: Zeros the timer and thickness. This duplicates the ZERO button on the front panel.
Command List For
STM-100 / MF
SECTION 5.6
Software Version
Code
Shutter Relay Control
Zero Thickness and
Timer
COMPUTER INTERFACING Page 5 - 8