INFICON STM-100/MF Thin Film Deposition Monitor - Manual (Page 15)

STM-100 / MF SPECIFICATIONS
DISPLAY TYPE ........................................ 7 DIGIT LCD
THICKNESS DISPLAY RANGE ................ 0 to 999.9 kÅ
RESOLUTION .................................. 1 Å autoranged
# DIGITS .......................................... 4
RATE DISPLAY RANGE........................... 0.0 to 999 Å/S
RESOLUTION .................................. 0.1 Å/S autoranged
# DIGITS .......................................... 3
MEASUREMENT PERIOD........................ 0.25 SEC
SENSOR TYPE ................................ Quartz Crystal Microbalance
FREQUENCY ................................... 6 MHz Plano Convex A/T Cut
MAX. FREQ. SHIFT ......................... 1 MHz
FILM PARAMETER .................................. 9 MATERIALS
VARIABLES .............................................. 7
FILM # .............................................. 1 to 9
MATERIAL. DENSITY ...................... 0.500 to 99.99 gm/cc
MATERIAL. Z FACTOR.................... 0.100 to 9.999
SYS. TOOLING ................................ 10.0 to 399 %
SHUTTER CLOSURE ...................... 0.000 to 9999 kÅ
THICKNESS SETPOINT .................. 0.000 to 9999 kÅ
TIMER SETPOINT ........................... 00:00 to 99:59 M:S
I/O CONNECTION .................................... 15 PIN D MALE
HARDWARE OUTPUTS ........................... 4, SPST 2.5A RELAYS
- Shutter Relay (Pins 5,6)
- Thickness Setpoint (Pins 7,8)
- Sensor Failure (Pins 1,2)
- Timer Setpoint (Pins 3,4)
HARDWARE INPUTS ............................... 4 TTL COMP., ACTIVE LOW
- Open Shutter (Pin 12)
- Close Shutter (Pin 11)
- Zero Thickness (Pin 10)
- Zero Timer (Pin 9)
Note: Pins 13,14,15 are GND.
ANALOG RECORDER ............................. + 10V F.S. RATE OR THICKNESS
- 2 mA max Load,
- 11 BIT Resolution
CONNECTION ................................. Miniature Stereo Jack
STD. COMMUNICATIONS I/O .................. RS-232, DUAL PROTOCOL
- 4 BAUD RATES
- 300,1200,2400,9600
CONNECTION ................................. - 9 PIN "D" FEMALE
SECTION 1.3
GENERAL INFORMATION Page 1 - 2