INFICON STM-100/MF Thin Film Deposition Monitor - Manual (Page 6)

Table of Contents
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REFACE .......................................................................................................................................................... I
W ARRANTY ....................................................................................................................................................... II
SYCON INSTRUMENTS, INC. P OLICY ........................................................................................................................ II
EQUIPMENT RETURN ............................................................................................................................................... II
T ABLE OF C ONTENTS ........................................................................................................................................ IV
L IST OF F IGURES ............................................................................................................................................... VIII
L IST OF T ABLES ................................................................................................................................................ IX
GENERAL INFORMATION ............................................................................................................................. 1-1
INTRODUCTION ........................................................................................................................................................ 1-1
SECTION 1.1 ....................................................................................................................................................... 1-1
UNPACKING .............................................................................................................................................................. 1-1
SECTION 1.2 ....................................................................................................................................................... 1-1
STM-100 / MF SPECIFICATIONS ............................................................................................................................. 1-2
SECTION 1.3 ....................................................................................................................................................... 1-2
SENSOR SPECIFICATIONS ...................................................................................................................................... 1-4
SECTION 1.4 ....................................................................................................................................................... 1-4
OPERATION ................................................................................................................................................... 1-4
FEEDTHROUGH INSTALLATION .............................................................................................................................. 1-4
WATER ........................................................................................................................................................... 1-4
ELECTRICAL .................................................................................................................................................. 1-4
MATERIALS
(IN VAC) ..................................................................................................................................... 1-4
SENSOR SPARE PARTS ........................................................................................................................................... 1-5
SECTION 1.5 ....................................................................................................................................................... 1-5
STM-100 / MF PARTS & ACCESSORIES ................................................................................................................. 1-5
SECTION 1.6 ....................................................................................................................................................... 1-5
MONITOR ....................................................................................................................................................... 1-5
FEEDTHROUGHS .......................................................................................................................................... 1-5
SENSORS ...................................................................................................................................................... 1-5
OPTIONS ........................................................................................................................................................ 1-5
ACCESSORIES .............................................................................................................................................. 1-5
SENSOR
CRYSTALS ..................................................................................................................................... 1-5
OPERATION AND PROGRAMMING ............................................................................................................. 2-1
KEYBOARD DESCRIPTION ...................................................................................................................................... 2-1
SECTION 2.1 ....................................................................................................................................................... 2-1
SYSTEM CONTROL KEY GROUP ............................................................................................................................. 2-1
SECTION 2.2 ....................................................................................................................................................... 2-1
S HUTTER K EYS ................................................................................................................................................. 2-2
ZERO K EY ....................................................................................................................................................... 2-2
C RYSTAL L IFE K EY ............................................................................................................................................. 2-2
DATA ENTRY AND PROGRAMMING GROUP ........................................................................................................... 2-2
SECTION 2.3 ....................................................................................................................................................... 2-2
P ROGRAM K EY .................................................................................................................................................. 2-2
E NTER K EY ....................................................................................................................................................... 2-3
A RROW K EYS .................................................................................................................................................... 2-3
FILM PARAMETERS ................................................................................................................................................. 2-3
SECTION 2.4 ....................................................................................................................................................... 2-3
LCD D ATA D ISPLAYS ......................................................................................................................................... 2-4
F ILM N UMBER P ARAMETER ................................................................................................................................. 2-4
D ENSITY P ARAMETER ......................................................................................................................................... 2-5
Z-F ACTOR P ARAMETER ...................................................................................................................................... 2-6
E ND T HICKNESS ................................................................................................................................................ 2-6
S ETPOINT T HICKNESS P ARAMETER ...................................................................................................................... 2-7
S ETPOINT T IMER ................................................................................................................................................ 2-7
T OOLING F ACTOR P ARAMETER ............................................................................................................................ 2-8
USER CONFIGURATION SWITCHES ....................................................................................................................... 2-8
SECTION 2.5 ....................................................................................................................................................... 2-8
SWITCH FUNCTION DEFINITIONS........................................................................................................................... 2-9
C ONFIGURATION ................................................................................................................................................ 2-9
TEST MODE ............................................................................................................................................................... 2-11
SECTION 2.6 ....................................................................................................................................................... 2-11
E NABLING THE T EST M ODE ................................................................................................................................. 2-11
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