INFICON STM-100/MF Thin Film Deposition Monitor - Manual (Page 9)

G ET THE P OWER ON S TATUS .............................................................................................................................. 5-12
F ORCE P ARAMETERS TO T HEIR D EFAULT V ALUES ................................................................................................. 5-12
T URN THE K EY B OARD B EEPER O N /O FF .............................................................................................................. 5-13
I NTERNAL U SE C OMMANDS ................................................................................................................................. 5-13
M ULTI -F ILM F ILM N UMBER S ELECTION ................................................................................................................. 5-13
M ULTI -F ILM D ENSITY P ARAMETER ....................................................................................................................... 5-13
M ULTI -F ILM Z-F ACTOR P ARAMETER ..................................................................................................................... 5-13
M ULTI -F ILM E ND T HICKNESS P ARAMETER ............................................................................................................ 5-14
M ULTI -F ILM S ET P OINT RELAY T HICKNESS P ARAMETER ......................................................................................... 5-14
M ULTI -F ILM S ET P OINT T IMER R ELAY P ARAMETER ................................................................................................ 5-14
M ULTI -F ILM T OOLING F ACTOR P ARAMETER .......................................................................................................... 5-14
MAINTENANCE .............................................................................................................................................. 6-1
W ARNINGS ................................................................................................................................................................... 6-1
SECTION 6.1 ....................................................................................................................................................... 6-1
CONTROL UNIT ......................................................................................................................................................... 6-1
REPLACING A SENSOR CRYSTAL........................................................................................................................... 6-2
SECTION 6.2 ....................................................................................................................................................... 6-2
P ERSISTENT C RYSTAL F AIL I NDICATION ........................................................................................................................... 6-3
SECTION 6.3 ....................................................................................................................................................... 6-3
A PPENDIX A-C OMMUNICATION D EMO D ISK ........................................................................................................ A-1
S ECTION A-1 .......................................................................................................................................................... A-1
STM-100 /MF S PECIFIC P ROGRAMS .............................................................................................................................. A-1
S ECTION A-2 .......................................................................................................................................................... A-1
A PPENDIX B-T ECHNICAL D RAWINGS .................................................................................................................. B-1
A PPENDIX C-SHMX-4 O PERATION .................................................................................................................... C-1
I NTRODUCTION ........................................................................................................................................................ C-1
O PERATION ............................................................................................................................................................. C-2
I NSTALLATION .......................................................................................................................................................... C-2
Page vii Table of Contents