INFICON STM-100/MF Thin Film Deposition Monitor - Manual (Page 26)

The Z-Factor parameter refers to the elastic properties of the measured
material. This value is utilized in the thickness equation to match the
acoustical properties of the film being measured to the acoustic properties of
the base quartz material of the sensor crystal. This correction is necessary to
insure accurate measurements when sensor crystal shifts of greater than 15%
are realized. See Table 4.1 for an extensive material value list. See Section
4.2 for calibration information.
END THICKNESS
Figure 2.9: End Thickness Parameter.
LEGEND END THK
RANGE 0 to 9999
UNITS KILO ANGSTROMS (1 Angstrom = 10-10 meters)
The END THICKNESS parameter is used to provide a trigger setpoint for
the STM-100 / MF Shutter Relay contacts. If the shutter relay contacts are
closed by operating the front panel shutter closed button or by remote input.
These contacts will return to the open state when the thickness display value
becomes equal to or exceeds the END THICKNESS SETPOINT value. The
STM-100 / MF Shutter Relay contacts are normally used to automatically
control a deposition system source shutter. This is a trigger event and will
only effect shutter status at the time the event occurs. If the shutter relay
contacts were already open at the time of the event the event will be ignored.
A setpoint value of 0.000 kÅ causes the setpoint function to be ignored.
Z-Factor Parameter
End Thickness
OPERATION AND PROGRAMMING Page 2 - 6