INFICON STM-100/MF Thin Film Deposition Monitor - Manual (Page 72)

MAINTENANCE
Warnings
WARNING There are potentially lethal voltages present within the
STM-100 / MF control unit with a line cord or a
INPUT/OUTPUT cable attached. There are no operator
serviceable components inside, do not remove any
covers. Service should be performed by qualified
personnel only. Disconnect all cables when removing or
installing the STM-100 / MF instrument.
CAUTION The STM-100 / MF and remote oscillator contain static
sensitive components. Use adequate and appropriate
precautions when attempting any service to these
devices.
CONTROL UNIT
SYMPTOM CAUSE REMEDY
1. No Power LED a. Blown fuse
Replace Fuse
b. Power switch off
Switch power on
c. Line cord loose or unplugged
Tighten cord
2. Constant crystal fail
message
a. Bad or severely oxidized sensor
crystal
New Crystal
b. Cable connections to oscillator or
sensor missing or loose
Check Cables
c. Severe material buildup on edges of
crystal holder causing a short at the
sensor
Clean Sensor
3. Large thickness
jumps during
deposition
a. Defective crystal
New Crystal
b. Crystal near end of life
New Crystal
c. Particles or flakes on crystal seating
surface
Clean Sensor
4. Crystal stops
suddenly during
deposition before
reaching typical life
expectancy.
a. Crystal being hit by small droplets of
molten material source.
Move farther from
source.
SECTION 6.1
Page 6 - 1 MAINTENANCE