INFICON STM-100/MF Thin Film Deposition Monitor - Manual (Page 40)

THICKNESS MODE - The analog recorder output in the thickness mode is
always scaled for plus or minus 999 Angstroms full scale (10V). Resolution is
always one (1) Angstrom. Display readings above 999 Angstroms will be sent to
the recorder output as the remainder of the displayed value divided by 1000.
CHART RECORDING OF 3500Å FILM
3500Å
ANALOG OUTPUT
FOR THICKNESS
3000Е 2000Е 1000Е
V
O
L
T
S
Figure 3.4: Example of Thickness Mode Recorder Output.
RATE MODE - The analog recorder output for the rate mode is scaled for a
full scale (999.9 Å/S) reading of 10 volts. Readings of 0 Å/S to 100 Å/S have a
slope to 50 mV per Å/S and above 100.0 Å/S have a slope of 5.555 mV per Å/S.
Readings up to 100.0 Å/S will be output with a resolution of 0.1 Å/S and values
above 100.0 Angstroms will be output with a resolution of 1.0 Å/S. At a rate of 100
Å/S the recorder output is 5 volts . This method allows a continuous recorder
accuracy of at least 0.3% and also provides a unique output voltage for any rate
value within the displayable range of values. Negative rate values will be indicated
by negative output voltages.
RATE - Ånstroms / Second
Slope 5.555mv per Å/sec
between 100 Å/s and 1000 Å/s
Slope 50 mv per Å/sec
between 0 and 100 Å/sec
ANALOG OUPUT
FOR RATE
V
O
L
T
S
100 200 300 400 500 600 700 800 900 1000
Figure 3.5: Example of Rate Mode Recorder Output.
RECORDER
CALIBRATION
Recorder Outputs
INSTALLATION Page 3 - 6