Brooks Instrument GF126 - Manual (Page 6)

ii
GF100 Series
Installation and Operation Manual
X-TMF-GF100-Series-MFC-eng
Part Number: 541B137AAG
March, 2013
Contents
Appendix A: GF100 Series Gas Table
A-1 Overview ....................................................................................................................................... A-1
Appendix B: GF100 Series Patents
B-1 Overview ....................................................................................................................................... B-1
Appendix C: Essential Instructions
C-1 Overview ....................................................................................................................................... C-1
Warranty, Local Sales/Service Contact Information ....................................................................... Back Cover
Figure Figure
Number Number
1-1 GF100 Series High Performance Gas Flow Controller Analog and Digital .................................... 1-1
1-2 LED Display .................................................................................................................................. 1-7
1-3 Dimensions - GF100 Series ......................................................................................................... 1-12
1-4 Dimensions - GF135, DeviceNet .................................................................................................. 1-13
1-5 Dimensions - GF135, RS485 ....................................................................................................... 1-14
2-1 Typical Gas Supply Arrangement with Non-PTI MFC .................................................................... 2-4
2-2 Typical Gas Supply Arrangement with PTI MFC ........................................................................... 2-4
2-3 GF100 Series Mounting Attitude Positions .................................................................................... 2-6
2-4 GF100 Series Mounted to K1 Series Substrate Blocks ................................................................. 2-7
2-5 Mounting Screws Torque Pattern .................................................................................................. 2-8
2-6 Display with PSI Reading .............................................................................................................. 2-9
2-7 Display Reading Zero PSI ............................................................................................................ 2-10
2-8 Display Set to %FS ...................................................................................................................... 2-10
2-9 %Flow Display Set to Zero ........................................................................................................... 2-10
2-10 MultiFlo Cable Adapter ................................................................................................................. 2-12
2-11 RS-232/RS-485 Converter (P/N A33231) ..................................................................................... 2-13
2-12 Diagnostic Port ............................................................................................................................. 2-13
2-13 GF100 Series DeviceNet Connection .......................................................................................... 2-14
2-14 GF100 Series with 9-Pin Analog Connector ................................................................................. 2-15
2-15 Analog 9-Pin Connector (M) ......................................................................................................... 2-15
2-16 GF100 Series Electrical Interface Options ................................................................................... 2-16
2-17 GF135 Series Showing Inlet/Outlet Pneumatic Isolation Valve Lines ........................................... 2-17
3-1 GF100 Series Operating Principles ............................................................................................... 3-2
Table Table
Number Number
1-1 Industry Standard References ....................................................................................................... 1-3
1-2 Terms and Acronyms .................................................................................................................... 1-4
1-3 Specifications for Standard GF100 Series .................................................................................... 1-9
1-4 Specifications for High Accuracy (HA) GF100 Series .................................................................. 1-10
1-5 Specifications for Safe Delivery System (SDS) GF100 Series ..................................................... 1-10
1-6 Specifications for GF135 Series ................................................................................................... 1-11
2-1 K1 Series Fasteners ...................................................................................................................... 2-7
2-2 K1 Substrate Torque Data ............................................................................................................. 2-7
2-3 Gas and Flow Ranges - MultiFlo Configurable - N2 Equivalent .................................................... 2-9
4-1 Environmental Factors .................................................................................................................. 4-3
4-2 GF100 Series Troubleshooting Guide ........................................................................................... 4-4
5-1 GF100 Series Product Description Code Table ............................................................................. 5-1
5-2 Model GF135 Product Description Code Table ............................................................................. 5-3
A-1A GF100 Series Gas Table - Codes 1-110, Bins SH40 to SH50 ....................................................... A-1
A-1B GF100 Series Gas Table - Codes 118-953, Bins SH40 to SH50 ................................................... A-2
A-1C GF100 Series Gas Table - Codes 958-5022, Bins SH40 to SH50 ................................................ A-3
B-1 GF100 Series Patents ................................................................................................................... B-1