Brooks Instrument GF126 - Manual (Page 53)

5-1
GF100 Series
Installation and Operation Manual
X-TMF-GF100-Series-MFC-eng
Part Number: 541B137AAG
March, 2013 Section 5 Product Description Code
Table 5-1 GF100, GF120 & GF125 Series Product Description Code Table
Code Description Code Description Code Description Code Description Code Description Code Option Code Option Code Option Code Option Code Option Option Description Option Description Option Description Option Description Option Description
I. I.I. I.I. Base Model Code GF GF GF GF GF High Purity/Ultra High Purity Digital Mass Flow Controllers
II. II. II. II. II. Package / Finish Specifications 100 100 100 100 100 Flow range 3 sccm -55 slpm N
22222
Eq.; + 1.0% SP Accuracy; 1 sec Response; 10 Ra
120 120 120 120 120 Flow range 3 sccm -55 slpm N
22222
Eq.; + 1.0% SP Accuracy; 500 msec Response; 4 Ra
125 125 125 125 125 Pressure Transient Insensitive (PTI) Flow range 3 sccm -55 slpm N
22222
Eq.; + 1.0% SP Accuracy;
300-500 msec Response; 4 Ra
III. III. III. III. III. Configurability CCCCC MultiFlo capable. Standard bins or specific gas/range may be selected.
XXXXX Not MultiFlo capable. Specific gas/range required. (must select w/ SD, SL or HA special application)
IV IV IV IV IV..... Special Application XX XX XX XX XX Standard
HA HA HA HA HA High Accuracy Calibration; (GF125 only)
SL SL SL SL SL Safe Delivery System (GF120 Only) Full scale flow range; 4 to 25 sccm, Nitrogen Equivalent
SD SD SD SD SD Safe Delivery System (GF120 Only) Full scale flow range; >25 sccm to 1 slpm, Nitrogen Equivalent
VVVVV..... Valve Configuration O O O O O Normally Open valve (not available with SD, SL or HA options)
CCCCC Normally Closed valve (must select with SD, SL or HA special application)
M M M M M Meter (No Valve)
VI. VI. VI. VI. VI. Gas or SH MultiFlo Bin XXXX XXXX XXXX XXXX XXXX XXXX XXXX XXXX XXXX XXXX Specific Gas Code & Range, i.e. “0004” = Argon and “010L” = 10 slpm (must select w/ SD, SL or
HA special application).
SH40 010C SH40 010C SH40 010C SH40 010C SH40 010C *Standard Configuration #40, 3-10 sccm Nitrogen Equivalent
SH41 030C SH41 030C SH41 030C SH41 030C SH41 030C *Standard Configuration #41, 11-30 sccm Nitrogen Equivalent
SH42 092C SH42 092C SH42 092C SH42 092C SH42 092C *Standard Configuration #42, 31-92 sccm Nitrogen Equivalent
SH43 280C SH43 280C SH43 280C SH43 280C SH43 280C Standard Configuration #43,93-280 sccm Nitrogen Equivalent
SH44 860C SH44 860C SH44 860C SH44 860C SH44 860C Standard Configuration #44, 281-860 sccm Nitrogen Equivalent
SH45 2.6L SH45 2.6L SH45 2.6L SH45 2.6L SH45 2.6L Standard Configuration #45, 861-2600 sccm Nitrogen Equivalent
SH46 7.2L SH46 7.2L SH46 7.2L SH46 7.2L SH46 7.2L Standard Configuration #46, 2601-7200 sccm Nitrogen Equivalent
SH47 015L SH47 015L SH47 015L SH47 015L SH47 015L Standard Configuration #47, 7201-15000 sccm Nitrogen Equivalent
SH48 030L SH48 030L SH48 030L SH48 030L SH48 030L Standard Configuration #48, 15001-30000 sccm Nitrogen Equivalent
SH49 040L SH49 040L SH49 040L SH49 040L SH49 040L Standard Configuration #49, 30001-40000 sccm Nitrogen Equivalent
SH50 055L SH50 055L SH50 055L SH50 055L SH50 055L Standard Configuration #50, 40001-55000 sccm Nitrogen Equivalent
VII. VII. VII. VII. VII. Fitting VX VX VX VX VX 1-1/2” body width, 124mm 1/4” VCR male
CX CX CX CX CX 1-1/8” body width, 92mm C Seal
D D D D DXXXXX 1-1/8” body width, 79.8mm C Seal
EX EX EX EX EX 1-1/2” body width, 79.8mm W Seal
WX WX WX WX WX 1-1/8” body width, 92mm W Seal
YX YX YX YX YX 1-1/8” body width, 79.8mm W Seal
AX AX AX AX AX 1-1/2” body width, 92mm C Seal
B BB BBXXXXX 1-1/2” body width, 92mm W Seal
LLLLLXXXXX 1-1/8” body width, 92mm C Seal w/Poke Yoke
VIII. VIII. VIII. VIII. VIII. Downstream Condition AAAAA Atmosphere
VVVVV Vacuum; Default for SD, SL and HA special application
IX. IX. IX. IX. IX. Sensor O O O O O Default Sensor Orientation
Note: *Bins SH40, SH42, SH42 are not avaiable with normally open valve.