Brooks Instrument GF126 - Manual (Page 15)

1-9
GF100 Series
Installation and Operation Manual
X-TMF-GF100-Series-MFC-eng
Part Number: 541B137AAG
March, 2013 Section 1 Introduction
Table 1-3 Specifications for Standard GF100 Series
GF100 GF100 GF100 GF100 GF100 GF120 GF120 GF120 GF120 GF120 GF125 GF125 GF125 GF125 GF125
Electrical Electrical Electrical Electrical Electrical
Electrical Connection Electrical Connection Electrical Connection Electrical Connection Electrical Connection RS485/Analog via 9-Pin “D” connector, DeviceNet TM via 5-Pin “M12” connector
Digital Communication Digital Communication Digital Communication Digital Communication Digital Communication RS485+ (model specific), DeviceNet (model specific), RS485 Diagnostic Port (all models)
Diagnostic /Service P Diagnostic /Service P Diagnostic /Service P Diagnostic /Service P Diagnostic /Service Port ort ort ort ort RS485 via 2.5mm jack
P P P P Power Supply/Consumption ower Supply/Consumption ower Supply/Consumption ower Supply/Consumption ower Supply/Consumption DeviceNet: 545mA max. @ +11-25 Vdc., 250mA max. @ 24Vdc RS485/Analog: 6 Watts max @ +15Vdc. (+10%)
PPPPPerformance erformance erformance erformance erformance
Full Scale Flow Range (N Full Scale Flow Range (N Full Scale Flow Range (N Full Scale Flow Range (N Full Scale Flow Range (N
22222
Eq.) Eq.) Eq.) Eq.) Eq.) 3 sccm to 55 slm
Flow Flow Flow Flow Flow Accur Accur Accur Accur Accuracy acy acy acy acy +1% S.P. > 35-100%, +0.35% F.S. 2-35%
Repeatability & Repr Repeatability & Repr Repeatability & Repr Repeatability & Repr Repeatability & Reproducibility oducibility oducibility oducibility oducibility < + 0.15% S.P.
Linearity Linearity Linearity Linearity Linearity + 0.5% F.S. (included in accuracy)
Response Response Response Response Response Time (Settling Time (Settling Time (Settling Time (Settling Time (Settling Time) Time) Time) Time) Time) 300ms (3-860 sccm N2 Eq.)
Normally Closed Normally Closed Normally Closed Normally Closed Normally Closed VVVVValve alve alve alve alve < 1 sec <1 sec 400ms (861-7200 sccm N2 Eq.)
500ms (7201-30000 sccm N2 Eq.)
<700ms (30001-55000 sccm N2 Eq.)
Normally Open Normally Open Normally Open Normally Open Normally Open VVVVValve alve alve alve alve <1.5 sec
Pr Pr Pr Pr Pressur essur essur essur essure Insensitivity e Insensitivity e Insensitivity e Insensitivity e Insensitivity Not Applicable < 5% SP up to 5 psi/sec upstream press. spike
Con Con Con Con Contr tr tr tr trol Range ol Range ol Range ol Range ol Range 2-100% (Normally Closed Valve) 3-100% (Normally Open Valve)
MultiFlo MultiFlo MultiFlo MultiFlo MultiFlo optional standard
#of Bins #of Bins #of Bins #of Bins #of Bins 11 bins
VVVVValve Shut Down (N.C. alve Shut Down (N.C. alve Shut Down (N.C. alve Shut Down (N.C. alve Shut Down (N.C. VVVVValve) alve) alve) alve) alve) < 1% of F.S.
VVVVValve Shut Down (N.O. alve Shut Down (N.O. alve Shut Down (N.O. alve Shut Down (N.O. alve Shut Down (N.O. VVVVValve) alve) alve) alve) alve) 2% of F.S.
ZZZZZer er er er ero Stability o Stability o Stability o Stability o Stability < + 0.5% F.S. per year
TTTTTemper emper emper emper emperatur atur atur atur ature Coefficien e Coefficien e Coefficien e Coefficien e Coefficienttttt Span: 0.005% full scale per o C, Zero: 0.001% full scale per o C
Ratings Ratings Ratings Ratings Ratings
Oper Oper Oper Oper Operating ating ating ating ating TTTTTemper emper emper emper emperatur atur atur atur ature Range e Range e Range e Range e Range 10-50 o C
Differ Differ Differ Differ Differen en en en ential Pr tial Pr tial Pr tial Pr tial Pressur essur essur essur essure Range* e Range* e Range* e Range* e Range* 3-860 sccm = 7-45 psid, 861- 7200 sccm = 10-45 psid, 7201-55000 sccm = 15-45 psid
*Argon gas applications require an additional 10 psid differential pressure.
Low vapor pressure gases require an inlet pressure of > 100 Torr, with vacuum on outlet
(example SiCl4). Contact Brooks Technical Support for more information.
Maximum Oper Maximum Oper Maximum Oper Maximum Oper Maximum Operating Pr ating Pr ating Pr ating Pr ating Pressur essur essur essur essureeeee 500 psia max 100 psia max
Pr Pr Pr Pr Proof Pr oof Pr oof Pr oof Pr oof Pressur essur essur essur essureeeee 700 psia max 140 psia max
Burst Pr Burst Pr Burst Pr Burst Pr Burst Pressur essur essur essur essureeeee 3000 psia max 500 psia max
Leak In Leak In Leak In Leak In Leak Integrity (external) tegrity (external) tegrity (external) tegrity (external) tegrity (external) 1x10 -11 atm. cc/sec He
Diagnostics & Display Diagnostics & Display Diagnostics & Display Diagnostics & Display Diagnostics & Display
Status Lights Status Lights Status Lights Status Lights Status Lights MFC Health, Network Status
Alarms Alarms Alarms Alarms Alarms Sensor Output, Control Valve Output, Over Temperature, Power Surge/Sag, Network Interruption
Display Display Display Display Display TTTTType ype ype ype ype Top Mount Integrated LCD
Viewing Viewing Viewing Viewing Viewing Angle / Angle / Angle / Angle / Angle / Viewing Distance Viewing Distance Viewing Distance Viewing Distance Viewing Distance Fixed / 10 feet
Units Displayed / Resolution Units Displayed / Resolution Units Displayed / Resolution Units Displayed / Resolution Units Displayed / Resolution Flow (%), Temp. ( o C), Pressure (psia, kPa) / 0.1 (unit)
Mec Mec Mec Mec Mechanical hanical hanical hanical hanical
VVVVValve alve alve alve alve TTTTType ype ype ype ype Normally Closed
Normally Open (>93sccm flow rate N2 Equivalent)
Meter (no valve)
W W W W Wetted Materials etted Materials etted Materials etted Materials etted Materials GF100: SEMI F20 GP Compliant, 316L VIM/VAR, Hastelloy C-22, 316L Stainless Steel, 304 Stainless Steel, KM-45
GF120/GF125: SEMI F20 UHP Compliant, 316L VIM/VAR, Hastelloy C-22, 316L Stainless Steel, 304 Stainless Steel, KM-45
Surface Finish Surface Finish Surface Finish Surface Finish Surface Finish 10 μ inch Ra 4 μ inch Ra (0.1 μm Ra)