Brooks Instrument GF126 - Manual (Page 21)

2-1
GF100 Series
Installation and Operation Manual
X-TMF-GF100-Series-MFC-eng
Part Number: 541B137AAG
March, 2013 Section 2 Installation
2-1 General
This section provides installation instructions for the Brooks GF100 Series
Thermal Mass Flow Devices. The installation process consists of purging
the gas supply line prior to installation, unpacking and inspecting the
device, connecting the device to the gas supply line and testing for leaks.
2-2 Receipt of Equipment
When the instrument is received, the outside packing case should be checked
for damage incurred during shipment. If the packing case is damaged, the
local carrier should be notified at once regarding their liability. A report should
be submitted to your nearest Product Service Department.
Brooks Instrument
407 W. Vine Street
P.O. Box 903
Hatfield, PA 19440 USA
Toll Free (888) 554 FLOW (3569)
Tel (215) 362 3700
Fax (215) 362 3745
E-mail: [email protected]
www.BrooksInstrument.com
Europe Asia
Brooks Instrument GmbH Brooks Instrument Korea, Ltd.
Zur Wetterwarte 50 Haus 377/B, D-406 Bundang Techno Park 151
01109 Dresden Sungnam, Kyungki-do, 463-070
Germany Korea
Tel +49 (0) 351 215 20 442 Tel +82 31 708 2522
In case you need technical assistance:
USA 888 275 8946 Taiwan +886 3 5590 988
Europe +49 351 215 2040 China +86 21 5079 8828
Japan +81 3 5633 7100 Singapore +6297 9741
Korea +82 31 708 2521
Remove the envelope containing the packing list. Outside of your clean area,
carefully remove the equipment from the packing case. Make sure spare parts
are not discarded with the packing material. Inspect the contents for damaged
or missing parts.
This device has been assembled, calibrated, and double-vacuum bagged in
a Class 100 clean room. In your semi-clean area, remove the outer bag
only. Pass the device into your clean area. Remove the second clean room
compatible bag only when the device is ready to be tested and/or installed
in your clean system.
2-3 Recommended Storage Practice
If intermediate or long-term storage of the device is required, it is
recommended that it be stored in accordance with the following conditions:
• Within the original shipping container.
• Ambient temperature 21°C (70°F) nominal, 32°C (90°F) maximum,
7°C (45°F) minimum.
• Relative humidity 45% nominal, 60% maximum, 25% minimum.