Brooks Instrument GF126 - Manual (Page 17)

1-11
GF100 Series
Installation and Operation Manual
X-TMF-GF100-Series-MFC-eng
Part Number: 541B137AAG
March, 2013 Section 1 Introduction
PPPPPerformance erformance erformance erformance erformance
Full Scale Flow Range: Full Scale Flow Range: Full Scale Flow Range: Full Scale Flow Range: Full Scale Flow Range: 3 sccm to 5 slm (N2 Eq.)
Gasses Supported: Gasses Supported: Gasses Supported: Gasses Supported: Gasses Supported: N2, O2, Ar, H2, SF6, NH3, CO2, Cl2, HBr, NF3, CF4, CH4, CH3F, CH2F2, SiCl4 (@ 100 Torr),
C4F6-q (@ 800 Torr), C4F8 (@ 1200 Torr)
Flow Flow Flow Flow Flow Accur Accur Accur Accur Accuracy: acy: acy: acy: acy: +/-1.0%S.P. (10-100%F.S.), +/-1% S.P. plus +/-0.04% F.S. (2-10%F.S.)
Repeatability & Repr Repeatability & Repr Repeatability & Repr Repeatability & Repr Repeatability & Reproducibility: oducibility: oducibility: oducibility: oducibility: < +/- 0.15% S.P.
Linearity: Linearity: Linearity: Linearity: Linearity: Included in accuracy
Settling Settling Settling Settling Settling Time: Time: Time: Time: Time: <300ms (<860 sccm N2 Equivalent), <400ms (861-5000 sccm N2 Equivalent)
Pr Pr Pr Pr Pressur essur essur essur essure Insensitivity: e Insensitivity: e Insensitivity: e Insensitivity: e Insensitivity: < 1% SP up to 5 psi/sec upstream press. spike
Con Con Con Con Contr tr tr tr trol Range: ol Range: ol Range: ol Range: ol Range: 1-100%
VVVVValve Shut Down: alve Shut Down: alve Shut Down: alve Shut Down: alve Shut Down: < 0.5% of F.S. N2
ZZZZZer er er er ero Stability: o Stability: o Stability: o Stability: o Stability: < +/- 0.5% F.S. per year
TTTTTemper emper emper emper emperatur atur atur atur ature Coefficien e Coefficien e Coefficien e Coefficien e Coefficient: t:t: t: t: Span: +/-0.05% full scale per °C, Zero: +/-0.005% full scale per °C
Rate-of-Decay P Rate-of-Decay P Rate-of-Decay P Rate-of-Decay P Rate-of-Decay Performance erformance erformance erformance erformance
Flow Rate: Flow Rate: Flow Rate: Flow Rate: Flow Rate: Maximum flow for which an ROD measurement can be obtained 800 sccm
Accur Accur Accur Accur Accuracy: acy: acy: acy: acy: +/- 2% of setpoint down to 5% SP, then 0.1% FS from 5% SP to 1% SP
TTTTTemper emper emper emper emperatur atur atur atur ature Coefficien e Coefficien e Coefficien e Coefficien e Coefficient: t:t: t: t: +/- 0.04% SP/Deg C
Pr Pr Pr Pr Pressur essur essur essur essure Coefficien e Coefficien e Coefficien e Coefficien e Coefficient: t:t: t: t: +/- 0.04% FS/psi
VVVVValve Leakby alve Leakby alve Leakby alve Leakby alve Leakby Accur Accur Accur Accur Accuracy: acy: acy: acy: acy: +/- 0.2% FS.
Ratings Ratings Ratings Ratings Ratings
Oper Oper Oper Oper Operating ating ating ating ating TTTTTemper emper emper emper emperatur atur atur atur ature Range: e Range: e Range: e Range: e Range: 10-50°C
Differ Differ Differ Differ Differen en en en ential Pr tial Pr tial Pr tial Pr tial Pressur essur essur essur essure Range**: e Range**: e Range**: e Range**: e Range**: 3-860 sccm = 7-45 psid, 861- 5000 sccm = 10-45 psid
**Typical pressure drop. Actual pressure drop will be gas and flow dependent.
Argon gas applications require higher differential pressure.
Low vapor pressure gases require an inlet pressure of > 100 Torr, with vacuum on outlet
(example SiCl4). Contact Brooks Technical Support for more information.
Maximum Oper Maximum Oper Maximum Oper Maximum Oper Maximum Operating Pr ating Pr ating Pr ating Pr ating Pressur essur essur essur essure: e: e: e: e: 100 psia max
Pneumatic Pneumatic Pneumatic Pneumatic Pneumatic VVVVValve Oper alve Oper alve Oper alve Oper alve Operating Pr ating Pr ating Pr ating Pr ating Pressur essur essur essur essure: e: e: e: e: 43.5 psia - 72.5 psia
Pr Pr Pr Pr Proof Pr oof Pr oof Pr oof Pr oof Pressur essur essur essur essure: e: e: e: e: 140 psia max
Burst Pr Burst Pr Burst Pr Burst Pr Burst Pressur essur essur essur essure: e: e: e: e: 500 psia max
Leak In Leak In Leak In Leak In Leak Integrity (external): tegrity (external): tegrity (external): tegrity (external): tegrity (external): 1x10-10 atm. cc/sec He
Mec Mec Mec Mec Mechanical hanical hanical hanical hanical
VVVVValve alve alve alve alve TTTTType: ype: ype: ype: ype: Normally Closed
W W W W Wetted Materials: etted Materials: etted Materials: etted Materials: etted Materials: SEMI F20 UHP Compliant 316L VIM/VAR, Hastelloy C-22,316L Stainless Steel, 304 Stainless Steel, KM-45
Surface Finish: Surface Finish: Surface Finish: Surface Finish: Surface Finish: 4 μ inch Ra (0.1 μm Ra)
Diagnostics & Display Diagnostics & Display Diagnostics & Display Diagnostics & Display Diagnostics & Display
Status Lights: Status Lights: Status Lights: Status Lights: Status Lights: MFC Health, Network Status
Alarms: Alarms: Alarms: Alarms: Alarms: Sensor Output, Control Valve Output, Over Temperature, Power Surge/Sag, Network Interruption,
Sensor Drift, Flow Error, Valve Leak
Display Display Display Display Display TTTTType: ype: ype: ype: ype: Top Mount Electronically Rotatable Integrated LCD
Viewing Distance: Viewing Distance: Viewing Distance: Viewing Distance: Viewing Distance: Fixed / 10 feet
Units Displayed / Resolution: Units Displayed / Resolution: Units Displayed / Resolution: Units Displayed / Resolution: Units Displayed / Resolution: Flow (%), Temp. (°C), Pressure (psia, kPa) / 0.1 (unit)
Electrical Electrical Electrical Electrical Electrical
Electrical Connection: Electrical Connection: Electrical Connection: Electrical Connection: Electrical Connection: Analog/RS-485 via 9-Pin “D” connector, DeviceNet via 5-Pin “M12” connector
Digital Communication: Digital Communication: Digital Communication: Digital Communication: Digital Communication: RS485+ (model specific), DeviceNet (model specific), RS485 Diagnostic Port (all models)
Diagnostic / Service P Diagnostic / Service P Diagnostic / Service P Diagnostic / Service P Diagnostic / Service Port: ort: ort: ort: ort: Micro USB
PPPPPower Supply/Consumption: ower Supply/Consumption: ower Supply/Consumption: ower Supply/Consumption: ower Supply/Consumption: DeviceNet: +11-25 Vdc., 545 mA max. @ 11 Vdc., 250 mA (max.) @ 24 Vdc.,
Analog /RS485: +/-15 Vdc. (+10%), 6 Watts (max) or +24 Vdc +/-10%
Compliance Compliance Compliance Compliance Compliance
En En En En Envir vir vir vir vironmen onmen onmen onmen onmental Compliance: tal Compliance: tal Compliance: tal Compliance: tal Compliance: CE: EN61326: 2006 (FCC Part 15 & Canada IC-subset of CE testing)
Safety: Safety: Safety: Safety: Safety: EN61010-1
DeviceNet DeviceNet DeviceNet DeviceNet DeviceNet ODVA
Table 1-6 Specifications for GF135 Series