Brooks Instrument GF126 - Manual (Page 16)

1-10
GF100 Series
Installation and Operation Manual
X-TMF-GF100-Series-MFC-eng
Part Number: 541B137AAG
March, 2013
Section 1 Introduction
Table 1-4 Specifications for High Accuracy (HA) GF100 Series
Table 1-5 Specifications for Safe Delivery System (SDS) GF100 Series
*Consult Technical Support for details.
**Typical pressure drop. Actual pressure
drop will be gas and flow dependent.
*Performance at minimum inlet pressure will
be gas and flow range dependent. Consult
Technical Support for details.
**Typical pressure drop. Actual pressure drop
will be gas and flow dependent. Consult
Technical Support for details.
***Consult factory for other gases.
GF125(HA) GF125(HA) GF125(HA) GF125(HA) GF125(HA)
GF125(HA) GF125(HA) GF125(HA) GF125(HA) GF125(HA)
PPPPPerformance erformance erformance erformance erformance
Full Scale Flow Range* Full Scale Flow Range* Full Scale Flow Range* Full Scale Flow Range* Full Scale Flow Range* 5 sccm - 10 slpm N
2
equivalent
Gases Supported Gases Supported Gases Supported Gases Supported Gases Supported N
22222
, O
22222
, Cl
2
, HBr, SiCl
44444
, H
2
MultiFlo Pr MultiFlo Pr MultiFlo Pr MultiFlo Pr MultiFlo Progr ogr ogr ogr ogrammable* ammable* ammable* ammable* ammable* Not Configurable
Flow Flow Flow Flow Flow Accur Accur Accur Accur Accuracy* acy* acy* acy* acy* 10-100%F.S.=+1.0%S.P.
2-10%F.S.=+1% S.P. plus +0.04% F.S.
Repeatability & Repr Repeatability & Repr Repeatability & Repr Repeatability & Repr Repeatability & Reproducibility oducibility oducibility oducibility oducibility < +0.15% S.P.
TTTTTurn Down Ratio urn Down Ratio urn Down Ratio urn Down Ratio urn Down Ratio 100:1
ZZZZZer er er er ero Stability o Stability o Stability o Stability o Stability < 0.5% F.S./ O C
Settling Settling Settling Settling Settling Time (to within Time (to within Time (to within Time (to within Time (to within + + + + +2% F 2% F 2% F 2% F 2% F.S.)* .S.)* .S.)* .S.)* .S.)* 300ms (<860 sccm N2 Equivalent)
400ms (861-7200 sccm N2 Equivalent)
500ms (7201-55000 sccm N2 Equivalent)
W W W W Warm Up arm Up arm Up arm Up arm Up Time Time Time Time Time Minimum of 30 minutes
Leak In Leak In Leak In Leak In Leak Integrity tegrity tegrity tegrity tegrity 1X10 -11 atm. cc/sec He
VVVVValve Shut Down (Leak by) alve Shut Down (Leak by) alve Shut Down (Leak by) alve Shut Down (Leak by) alve Shut Down (Leak by) <0.5% F.S.
Oper Oper Oper Oper Operating Conditions ating Conditions ating Conditions ating Conditions ating Conditions
Max. Oper Max. Oper Max. Oper Max. Oper Max. Operating Pr ating Pr ating Pr ating Pr ating Pressur essur essur essur essureeeee 100 psia max
Pr Pr Pr Pr Proof Pr oof Pr oof Pr oof Pr oof Pressur essur essur essur essureeeee 140 psia max
Burst Pr Burst Pr Burst Pr Burst Pr Burst Pressur essur essur essur essureeeee 500 psia max
Pr Pr Pr Pr Pressur essur essur essur essure Insensitivity e Insensitivity e Insensitivity e Insensitivity e Insensitivity +5% S.P. for up to 5 psi/sec. upstream press. spike
Differ Differ Differ Differ Differen en en en entialPr tialPr tialPr tialPr tialPressur essur essur essur essure** e** e** e** e**
High Pr High Pr High Pr High Pr High Pressur essur essur essur essure Gases e Gases e Gases e Gases e Gases 7-45 psid (N
2
, O
2
, Cl
2
, HBr, H
2
)
Low Pr Low Pr Low Pr Low Pr Low Pressur essur essur essur essure Gases e Gases e Gases e Gases e Gases >100 Torr (SiCl
4
)
VVVVValve Con alve Con alve Con alve Con alve Configur figur figur figur figuration* ation* ation* ation* ation* Normally Closed
Ambien Ambien Ambien Ambien Ambient t t t t TTTTTemper emper emper emper emperatur atur atur atur ature Range e Range e Range e Range e Range 10 o C-50 O C
ZZZZZer er er er ero o o o o TTTTTemper emper emper emper emperatur atur atur atur ature Coefficien e Coefficien e Coefficien e Coefficien e Coefficienttttt Span: 0.005% full scale per O C, Zero: 0.001% full scale per O C
GF120XSL GF120XSL GF120XSL GF120XSL GF120XSL GF120XSD GF120XSD GF120XSD GF120XSD GF120XSD
GF120XSD GF120XSD GF120XSD GF120XSD GF120XSD GF120XSL GF120XSL GF120XSL GF120XSL GF120XSL
Repeatability & Repr Repeatability & Repr Repeatability & Repr Repeatability & Repr Repeatability & Reproducibility oducibility oducibility oducibility oducibility <+/- 0.15% S.P.
ZZZZZer er er er ero Stability o Stability o Stability o Stability o Stability <=0.6% F.S. per year
Settling Settling Settling Settling Settling Time (to within Time (to within Time (to within Time (to within Time (to within + + + + +2% F 2% F 2% F 2% F 2% F.S.) .S.) .S.) .S.) .S.) < 3 sec
W W W W Warm Up arm Up arm Up arm Up arm Up Time Time Time Time Time minimum of 30 minutes
Leak In Leak In Leak In Leak In Leak Integrity tegrity tegrity tegrity tegrity 1X10 -11 atm. cc/sec He
VVVVValve Shut Down (Leaky by) alve Shut Down (Leaky by) alve Shut Down (Leaky by) alve Shut Down (Leaky by) alve Shut Down (Leaky by) <1% F.S.
PPPPPerformance erformance erformance erformance erformance
Full Scale Flow Range (N Full Scale Flow Range (N Full Scale Flow Range (N Full Scale Flow Range (N Full Scale Flow Range (N
22222
Eq.) Eq.) Eq.) Eq.) Eq.) 4 - 25 sccm >25 to 1 slpm
Gases Supported Gases Supported Gases Supported Gases Supported Gases Supported AsH
3
, PH
3
, BF
3
, SiF
4
, Ar, Xe, N
2
O, N
2
***
MultiFlo Pr MultiFlo Pr MultiFlo Pr MultiFlo Pr MultiFlo Progr ogr ogr ogr ogrammable ammable ammable ammable ammable Not Configurable
Flow Flow Flow Flow Flow Accur Accur Accur Accur Accuracy acy acy acy acy +/-0.35% S.P. <35% F.S.
+/-1% S.P. >35% F.S.
Oper Oper Oper Oper Operating Conditions ating Conditions ating Conditions ating Conditions ating Conditions
Minimum Oper Minimum Oper Minimum Oper Minimum Oper Minimum Operating Inlet Pr ating Inlet Pr ating Inlet Pr ating Inlet Pr ating Inlet Pressur essur essur essur essure* e* e* e* e* 4 to 20 sccm < 10 Torr
>20 to 50 sccm < 20 Torr
>50 sccm to 1 slpm < 50 Torr
Maximum Pr Maximum Pr Maximum Pr Maximum Pr Maximum Pressur essur essur essur essureeeee 500 psia max
Pr Pr Pr Pr Proof Pr oof Pr oof Pr oof Pr oof Pressur essur essur essur essureeeee 700 psia max
Burst Pr Burst Pr Burst Pr Burst Pr Burst Pressur essur essur essur essureeeee 3000 psia max
Pr Pr Pr Pr Pressur essur essur essur essure Insensitivity e Insensitivity e Insensitivity e Insensitivity e Insensitivity Not Available
Differ Differ Differ Differ Differen en en en entialPr tialPr tialPr tialPr tialPressur essur essur essur essure** e** e** e** e** 10 Torr-30 psid typical (1.33-207 kPa typical)
VVVVValve Con alve Con alve Con alve Con alve Configur figur figur figur figuration ation ation ation ation Normally Closed
Ambien Ambien Ambien Ambien Ambient t t t t TTTTTemper emper emper emper emperatur atur atur atur ature Range e Range e Range e Range e Range 10 o C-50 o C
ZZZZZer er er er ero o o o o TTTTTemper emper emper emper emperatur atur atur atur ature Coefficien e Coefficien e Coefficien e Coefficien e Coefficienttttt Span: 0.005% full scale per o C, Zero: 0.001% full scale per o C