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Gf100 series – Brooks Instrument GF126 User Manual

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GF100 Series

Installation and Operation Manual
X-TMF-GF100-Series-MFC-eng
Part Number: 541B137AAG
March, 2013

Section 1 Introduction

Figure 1-2 LED Display

Extensive Mechanical Configurations

GF Series supports all metal seal/UHP industry gas connection interface
standards for full OEM and process coverage.

• Downport 79.8mm and 92mm C-seal and W-seal on 1-1/8" and 1-1/2"
bodies

• 124mm 4 VCR on 1-1/2" body

Enhanced Diagnostics and User Interface

The mass flow controller is one of the most complex and critical
components in gas delivery systems. When dealing with ultra-high-purity
gas distribution or highly toxic or corrosive gases, removing the mass flow
controller to assess functionality should be the last resort. Brooks GF
Series devices provide for in-line device evaluation and instantaneous
troubleshooting through:

• Embedded self test routines and independent diagnostic/service port

• High visibility LCD display with easy accessible push button for local
indication of Flow (%), Temperature (

o

C), Pressure (PSIA/kPa) and

Network Address

• Zero button to easily re-zero the device during scheduled maintenance

This combination of features results in limiting service interruption and
reduced downtime.

Communication Interfaces

The GF100 Series supports analog 0-5 Vdc, RS485, and DeviceNet™
communication protocols. Analog connections can be accessed via the
DeviceNet or RS485 or Analog only connector options. DeviceNet and
RS485 are multi-drop connections that allow a maximum of 64 devices for
DeviceNet and 32 devices for RS485 to be connected on the same
network. Brooks Instrument’s DeviceNet profile has been certified by the
ODVA™ (Open DeviceNet Vendor’s Association). A range of low profile
adapter cables facilitate replacing previously installed devices eliminating
the need to carry multiple devices of the same gas/range but different
electrical connectors.