Brooks Instrument GF126 - Manual (Page 14)

1-8
GF100 Series
Installation and Operation Manual
X-TMF-GF100-Series-MFC-eng
Part Number: 541B137AAG
March, 2013
Section 1 Introduction
1-11 Specifications for GF100 Series Devices
See Table 1-3 for specifications for standard GF100 Series.
See Table 1-4 for specifications for the high accuracy (HA) GF100 Series.
See Table 1-5 for specifications for the Safe Delivery System (SDS) GF100
Series.
See Table 1-6 for specifications for the GF135 Series.
See Figure 1-3 for dimensions for the GF100 Series.
See Figures 1-4 & 1-5 for dimensions for the GF135 Series.