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Gf100 series – Brooks Instrument GF126 User Manual

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GF100 Series

Installation and Operation Manual

X-TMF-GF100-Series-MFC-eng

Part Number: 541B137AAG

March, 2013

Section 1 Introduction

1-11 Specifications for GF100 Series Devices

See Table 1-3 for specifications for standard GF100 Series.

See Table 1-4 for specifications for the high accuracy (HA) GF100 Series.

See Table 1-5 for specifications for the Safe Delivery System (SDS) GF100
Series.

See Table 1-6 for specifications for the GF135 Series.

See Figure 1-3 for dimensions for the GF100 Series.

See Figures 1-4 & 1-5 for dimensions for the GF135 Series.