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Brooks Instrument 5851EM User Manual

Brooks, Mass flow controllers

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Installation and Operation Manual

X -TMF-5965-5851EM-MFC-eng
Part Number: 541B122AAG
September, 2009

Brooks

®

Models 5965, 5851EM

Brooks

®

Models 5965, 5851EM

Mass Flow Controllers

Model 5851EM

Mass Flow Controller

with D-Connector

Model 5851EM Downported

Mass Flow Controller

with Card Edge

Model 5965

Mass Flow Controller

with Card Edge