Brooks Instrument Mfi Series User Manual
Nema 4x and ip66 mass flow controllers and meters
Installation and Operation Manual
X-TMF-Mfi-Mfx-MFC-eng
Part Number: 541B074AAG
August, 2009
Brooks
®
Mf Series
NEMA 4X and IP66 Mass Flow Controllers and Meters
Mfi Series
Controllers: Mf50i, Mf51i and Mf53i
Meters: Mf60i, Mf61i and Mf63i
Mfx Series
Controllers: Mf50x, Mf51x and Mf53x
Meters: Mf60x, Mf61x and Mf63x
Mf50
Mass Flow Controller
Mf61
Mass Flowmeter
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