Brooks Instrument GF126 - Manual (Page 47)

4-3
GF100 Series
Installation and Operation Manual
X-TMF-GF100-Series-MFC-eng
Part Number: 541B137AAG
March, 2013 Section 4 Maintenance & Troubleshooting
Table 4-1 Environmental Factors
4-3 Troubleshooting
This section includes a Troubleshooting Checklist and a GF100 Series
Troubleshooting Guide that identifies symptoms, possible causes, and
corrective actions.
4-4 Troubleshooting Checklist
1. Check environmental factors that could affect changes to GF100 Series
performance. The most common environmental factors are listed in
Table 4-1.
2. Check supply voltage and check for a consistent ground.
3. Insure OEM tool setpoint matches the setpoint at the GF100 Series.
Observe for consistency.
4. Verify isolations valves are open and the gas supply is turned on. Then
verify operating pressures are within operating ranges.
5. Check GF100 Series voltage response by moving the setpoint back
and forth.
Observe for voltage changes.
GF100 Series Performance Possible Causes
Inaccurate flow. Temperature shift (steady state or transient).
Inlet pressure shift (steady state or transient).
Power supply problem.
Electrical interference
Dirty gas chamber
Changes in gas.
Control problems. Can Differential pressure not within operating range
not reach setpoint. Inlet pressure not stable
Oscillation.
Zeroing problems, Indicated Temperature shift (steady state or transient).
zero is not stable. Inlet pressure shift (steady state or transient).
Power supply problem.
Electrical interference