beautypg.com

Gf100 series – Brooks Instrument GF126 User Manual

Page 24

background image

2-4

GF100 Series

Installation and Operation Manual

X-TMF-GF100-Series-MFC-eng

Part Number: 541B137AAG

March, 2013

Section 2 Installation

2-10 Flow Controller Installation Arrangement

Typical gas supply arrangements are shown in Figures 2-1 and 2-2.
GF100's are often arranged inside a gas panel. Configure standard
configurations ("SHs") or "blanks" for a variety of pure gases and mixtures.
As a result, MultiFlo technology enables the user to reduce unique
inventory requirements.

Figure 2-1 Typical Gas Supply Arrangement with non-PTI MFC

Figure 2-2 Typical Gas Supply Arrangement with PTI MFC