Gf100 series, Appendix a: gf100 series gas table – Brooks Instrument GF126 User Manual
Page 57
A-1
GF100 Series
Installation and Operation Manual
X-TMF-GF100-Series-MFC-eng
Part Number: 541B137AAG
March, 2013
Appendix A: GF100 Series Gas Table
Table A-1A GF100 Series Gas Table - Codes 1-108, Bins SH40 to SH50
For reference only, consult factory on the latest tables.
(990-100-0082-R17)
A-1 GF100 Series Gas Table
Table A-1 GF100 Series Gas Table
(Reference the following pages, A-1 and A-2).
SH40-SH47
SH48
SH49
SH50
Low High Low High Low High
Low
High
Low
High
Low
High
Low
High
Low
High
Low
High
Low
High
Low
High
1 He
Helium
19.7
24.7
29.7
5
14
15
42
43
128
129
400
401
1194
1195
3609
3610 11100 11101 23100 23101 47000 47001 100000
2 Ne
Neon
24.7
5
14
15
42
43
129
130
400
401
1207
1208
3650
3651 10700 10701 22100
4 Ar
Argon
24.7
29.7
39.7
44.7
5
14
15
42
43
130
131
400
401
1214
1215
3671
3672 10000 10001 20200 20201 41000 41001
42000 42001 55000
5 Kr
Krypton
29.7
4
11
12
32
33
100
101
300
301
930
931
2800
2801
7160
7161 14900
6 Xe
Xenon
24.7
3
6
7
19
20
58
59
178
179
546
547
1651
1652
4210
4211
8760
7 H2
Hydrogen
14.7
14.7
19.7
3
10
11
30
31
92
93
280
281
860
861
2600
2601
8000
8001 16400 16401 33000 33001
73000
8 Air
Air
24.7
29.7
3
10
11
30
31
92
93
280
281
860
861
2600
2601
7400
7401 15000 15001 30000
9 CO
Carbon Monoxide
24.7
29.7
3
10
11
30
31
92
93
280
281
860
861
2600
2601
7300
7301 15000 15001 30000
10 HBr
Hydrogen Bromide
24.7
3
8
9
25
26
77
78
235
236
723
724
2187
2188
5610
5611 11700
11 HCl
Hydrogen Chloride
24.7
29.7
3
10
11
30
31
92
93
280
281
860
861
2600
2601
6900
6901 14200 14201 29000
12 HF
Hydrogen Fluoride
14.7
17.7
3
10
11
30
31
94
95
281
282
880
881
2610
2611
7400
7401 15000 15001 30000
13 N2
Nitrogen
24.7
29.7
29.7
32.7
3
10
11
30
31
92
93
280
281
860
861
2600
2601
7200
7201 15000 15001 30000 30001
40000 40001 55000
14 D2
Deuterium
14.7
14.7
3
10
11
30
31
94
95
280
281
880
881
2600
2601
8100
8101 16500 16501 33000
15 O2
Oxygen
24.7
29.7
29.7
34.7
3
10
11
30
31
92
93
280
281
860
861
2600
2601
7200
7201 15000 15001 30000 30001
37000 37001 55000
16 NO
Nitric Oxide
24.7
29.7
3
10
11
30
31
92
93
280
281
860
861
2600
2601
7200
7201 15000 15001 30000
17 HI
Hydrogen Iodide
24.7
29.7
3
5
6
15
16
46
47
141
142
432
433
1305
1306
3340
3341
6960
6961 13900
18 F2
Fluorine
24.7
29.7
3
9
10
27
28
83
84
254
255
780
781
2358
2359
6700
6701 14000 14001 28000
19 Cl2
Chlorine
24.7
29.7
3
6
7
19
20
57
58
173
174
531
532
1604
1605
4850
4851 10100 10101 20200
22 H2S
Hydrogen Sulfide
24.7
29.7
3
8
9
25
26
76
77
232
233
713
714
2155
2156
5900
5901 12100 12101 24100
23 H2Se
Hydrogen Selenide
24.7
29.7
3
7
8
22
23
66
67
202
203
620
621
1874
1875
4770
4771 10000 10001 20000
25 CO2
Carbon Dioxide
24.7
29.7
29.7
29.7
3
7
8
22
23
69
70
209
210
642
643
1942
1943
5300
5301 11000 11001 22000 22001
28000 28001 39000
27 N2O
Nitrous Oxide
24.7
29.7
29.7
29.7
3
7
8
21
22
65
66
200
201
611
612
1849
1850
5100
5101 10400 10401 21000 21001
25000 25001 37000
28 CH4
Methane
24.7
24.7
29.7
3
8
9
23
24
71
72
215
216
660
661
2000
2001
5800
5801 12000 12001 24000 24001
46000
29 NH3
Ammonia
24.7
24.7
29.7
3
8
9
24
25
73
74
223
224
685
686
2072
2073
6000
6001 12200 12201 25000 25001
46000
31 PH3
Phosphine
19.7
24.7
3
7
8
22
23
67
68
205
206
629
630
1901
1902
5200
5201 10700 10701 21300
32 SO2
Sulfur Dioxide
19.7
24.7
3
6
7
17
18
52
53
157
158
483
484
1459
1460
3800
3801
7920
7921 15800
33 CH3F
Methyl Fluoride
24.7
29.7
3
7
8
22
23
67
68
204
205
625
626
1890
1891
5200
5201 10600 10601 21200
34 COS
Carbonyl Sulfide
24.7
29.7
3
7
8
20
21
60
61
183
184
562
563
1700
1701
4500
4501
9400
9401 18300
35 AsH3
Arsine
24.7
29.7
3
6
7
18
19
55
56
170
171
510
511
1550
1551
4000
4001
8500
8501 17000
37 ClCN
Cyanogen Chloride
14.7
21.7
3
5
6
15
16
46
47
142
143
435
436
1320
1321
3400
3401
7060
7061 14100
38 C2H4
Ethylene
24.7
29.7
3
6
7
17
18
54
55
163
164
501
502
1516
1517
4400
4401
9300
9301 18200
39 SiH4
Silane
24.7
29.7
3
6
7
18
19
56
57
170
171
523
524
1581
1582
4400
4401
9300
9301 18200
42 C2H2
Acetylene
16.7
19.7
3
6
7
18
19
57
58
170
171
530
531
1600
1601
4400
4401
9300
9301 18200
43 GeH4
Germane
24.7
29.7
3
6
7
17
18
53
54
161
162
495
496
1500
1501
4000
4001
8400
8401 16400
46 COF2
Carbonyl Fluoride
19.7
19.7
21.7
3
5
6
17
18
53
54
160
161
500
501
1500
1501
4000
4001
8400
8401 16500 16501
21000
48 BF3
Boron Trifluoride
19.7
24.7
3
5
6
16
17
50
51
150
151
457
458
1381
1382
3800
3801
7900
7901 15500
49 CHF3
Fluoroform (Freon-23)
24.7
24.7
24.7
26.7
3
5
6
16
17
48
49
145
146
445
446
1344
1345
3600
3601
7600
7601 15000 15001
17000 17001 26000
53 NF3
Nitrogen Trifluoride
24.7
29.7
24.7
26.7
3
5
6
15
16
46
47
140
141
430
431
1300
1301
3600
3601
7500
7501 15000 15001
17000 17001 26000
54 C2H6
Ethane
17.7
29.7
3
5
6
16
17
50
51
153
154
469
470
1418
1419
4000
4001
8300
8301 16300
58 B2H6
Diborane
19.7
19.7
3
4
5
12
13
38
39
116
117
358
359
1082
1083
3100
3101
6400
6401 12600
60 COCl2
Phosgene
12.7
14.7
3
3
4
11
12
35
36
106
107
325
326
1000
1001
2520
2521
5250
5251 10500
62 PF3
Phosphorus Trifluoride
19.7
24.7
3
4
5
14
15
42
43
129
130
400
401
1200
1201
3200
3201
6800
6801 13300
63 CF4
Carbon Tetrafluoride (Freon-14)
24.7
24.7
24.7
26.7
3
4
5
13
14
40
41
121
122
372
373
1123
1124
3010
3011
6400
6401 12600 12601
17000 17001 22000
67 SiH2Cl2
Dichlorosilane
14.7
19.7
3
3
4
10
11
29
30
89
90
273
274
824
825
2140
2141
4450
4451
8900
69 C3H6-b)
Propylene
19.7
19.7
3
4
5
12
13
36
37
110
111
338
339
1022
1023
2800
2801
5900
5901 11700
70 BCl3
Boron Trichloride
11.7
14.7
3
3
4
10
11
31
32
94
95
289
290
874
875
2230
2231
4650
4651
9300
72 ClO3F
Perchloryl Fluoride
14.7
20.7
3
4
5
12
13
38
39
114
115
350
351
1060
1061
2800
2801
5800
5801 11500
77 ClF3
Chlorine Trifluoride
14.7
20.7
3
4
5
11
12
35
36
107
108
327
328
1000
1001
2560
2561
5340
5341 10700
85 C2H7N
Dimethylamine
9.7
14.7
3
3
4
11
12
34
35
101
102
310
311
960
961
2530
2531
5400
5401 10600
88 SiF4
Silicon Tetrafluoride
19.7
24.7
3
4
5
11
12
34
35
103
104
316
317
1000
1001
2600
2601
5400
5401 10600
89 C3H8
Propane
9.7
11.7
3
3
4
10
11
32
33
100
101
300
301
910
911
2420
2421
5100
5101 10100
94 C2F4
Tetrafluoroethylene
19.7
19.7
3
3
4
10
11
31
32
100
101
300
301
900
901
2300
2301
4900
4901
9800
97 Si2H6
DISILANE
19.7
19.7
3
3
4
10
11
30
31
92
93
282
283
853
854
2300
2301
4900
4901
9800
99 GeF4
Germanium Tetrafluoride
20.7
24.7
3
3
4
10
11
30
31
92
93
282
283
860
861
2200
2201
4700
4701
9400
104 C4H8-i)
Butene
20.7
24.7
3
5
6
17
18
52
53
159
160
480
481
1420
1421
2950
2951
5900
108 SiCl4
Silicon Tetrachloride
8.7
3
6
7
18
19
56
57
172
173
520
521
1320
1321
2750
Gas
Code Gas Symbol
Gas Name
SH44
SH40
SH43
SH42
SH41
Min inlet pressure for vac. exhaust
(PSIA)
SH49
SH50
SH48
SH45
SH46
SH47