Gf100 series, Appendix a: gf100 series gas table – Brooks Instrument GF126 User Manual
Page 58
A-2
GF100 Series
Installation and Operation Manual
X-TMF-GF100-Series-MFC-eng
Part Number: 541B137AAG
March, 2013
Appendix A: GF100 Series Gas Table
For reference only, consult factory on the latest tables.
(990-100-0082-R17)
SH40-SH47
SH48
SH49
SH50
Low High Low High Low High
Low
High
Low
High
Low
High
Low
High
Low
High
Low
High
Low
High
Low
High
Gas
Code Gas Symbol
Gas Name
SH44
SH40
SH43
SH42
SH41
Min inlet pressure for vac. exhaust
(PSIA)
SH49
SH50
SH48
SH45
SH46
SH47
878 3%C2H4/He
3%Ethylene/Helium
19.7
19.7
4
13
14
40
41
125
126
375
376
1150
1151
3500
3501 10700 10701 22100 22101 45000
881 10%B2H6/Ar
5%Diborane/Argon
24.7
29.7
4
11
12
35
36
105
106
320
321
1000
1001
3000
3001
8100
8101 17000 17001 34000
897 2.7%C2H4/He
2.7%Ethylene/Helium
19.7
19.7
4
13
14
40
41
125
126
377
378
1158
1159
3502
3503 10700 10701 22200 22201 45000
898 1%GeH4/H2
1%Germane/Hydrogen
20.7
20.7
3
10
11
30
31
91
92
275
276
850
851
2530
2531
8000
8001 16200 16201 33000
910 .5%GeH4/H2
0.5%Germane/Hydrogen
20.7
20.7
3
10
11
30
31
92
93
280
281
860
861
2600
2601
8000
8001 16300 16301 33000
916 2%PH3/H2
2%Phosphine/Hydrogen
21.7
21.7
3
10
11
30
31
91
92
275
276
850
851
2530
2531
8000
8001 16200 16201 33000
917 50%C3H6-b)/N2
50%Propylene/Nitrogen
19.7
21.7
3
5
6
17
18
53
54
160
161
500
501
1500
1501
4100
4101
8600
8601 17000
925 10%C3H6-b)/N2
10%Propylene/Nitrogen
19.7
21.7
3
8
9
26
27
82
83
243
244
760
761
2300
2301
6400
6401 13100 13101 26100
929 10%CH4/N2
10%Methane/Nitrogen
19.7
21.7
3
10
11
29
30
91
92
272
273
850
851
2520
2521
7200
7201 15000 15001 30000
930 3.9%H2/N2
3.9%Hydrogen/Nitrogen
24.7
29.7
3
10
11
30
31
92
93
280
281
860
861
2600
2601
7400
7401 15100 15101 30100
939 10%B2H6/He
10%Diborane/Helium
19.7
19.7
4
11
12
34
35
103
104
314
315
965
966
2918
2919
9000
9001 18400 18401 37000
946 30%C2H4/He
30%Ethylene/Helium
19.7
24.7
3
10
11
30
31
90
91
275
276
850
851
2551
2552
7800
7801 16000 16001 32000
950 10%H2/He
10%Hydrogen/Helium
19.7
19.7
4
13
14
40
41
125
126
380
381
1200
1201
3500
3501 10700 10701 22200 22201 45000
953 15%H2/B2H6
15%Hydrogen/Diborane
19.7
19.7
3
4
5
14
15
42
43
130
131
400
401
1200
1201
3400
3401
7100
7101 14000
958 17%CH4/CO2
17%Methane/Carbon Dioxide
24.7
29.7
3
7
8
23
24
70
71
210
211
650
651
2000
2001
5400
5401 11000 11001 22000
962 20%CH6Si/H2
20%Methylsilane (MONO)/Hydrog
14.7
19.7
3
7
8
23
24
71
72
212
213
660
661
2000
2001
5900
5901 12000 12001 24000
965 50%CH3SiHCl2/H250%Dichloromethylsilane/Hydroge
11.7
13.7
3
4
5
14
15
42
43
130
131
400
401
1200
1201
3100
3101
6600
6601 13000
978 20%GeH4/H2
20%Germane/Hydrogen
19.7
24.7
3
8
9
26
27
81
82
241
242
750
751
2240
2241
6600
6601 13500 13501 27000
979 0.5%B2H6/He
0.5%Diborane/Helium
14.7
19.7
5
14
15
42
43
130
131
400
401
1200
1201
3700
3701 11000 11001 23000 23001 47000
980 20%F2/Ar
20%Fluorine/Argon
24.7
29.7
4
13
14
39
40
120
121
360
361
1100
1101
3400
3401
9000
9001 18400 18401 37000
982 5%HF/N2
5%Hydrogen Fluoride/Nitrogen
24.7
29.7
4
10
11
30
31
92
93
280
281
860
861
2600
2601
7200
7201 15000 15001 30000
983 3%H2S/CO
3%Hydrogen Sulfide/Carbon Mon
24.7
29.7
3
10
11
30
31
92
93
280
281
860
861
2600
2601
7200
7201 15000 15001 30000
984 1.4%C2H2/Ar
1.4%Acetylene/Argon
24.7
29.7
5
14
15
42
43
130
131
390
391
1200
1201
3600
3601
9700
9701 20000 20001 40000
985 2%Ge2H6/H2
2%Digermane/Hydrogen
24.7
29.7
3
10
11
30
31
92
93
280
281
860
861
2600
2601
7200
7201 15000 15001 30000
986 38%SiCl4/O2
38%Silicon Tetrachloride/Oxygen
24.7
29.7
29.7
29.7
3
5
6
16
17
50
51
150
151
460
461
1400
1401
3600
3601
7500
7501 15000 15001
15001 15002 25000
987 20%H2S/20%CO2/ 20%Hydrogen Sulfide/20%Carbon
24.7
29.7
3
9
10
27
28
85
86
252
253
790
791
2400
2401
6500
6501 13300 13301 27000
988 20%SiH2Cl2/H2
20%Dichlorosilane/Hydrogen
24.7
29.7
3
8
9
24
25
74
75
222
223
700
701
2100
2101
5900
5901 12000 12001 24000
989 0.1%Cl2/N2
0.1%Chlorine/Nitrogen
24.7
29.7
4
10
11
30
31
94
95
280
281
880
881
2600
2601
7400
7401 15000 15001 30000
990 1%HCl/N2
1%Hydrogen Chloride/Nitrogen
24.7
29.7
4
10
11
30
31
94
95
280
281
880
881
2600
2601
7400
7401 15000 15001 30000
991 3%BCl3/N2
3%Boron Trichloride/Nitrogen
24.7
29.7
3
9
10
29
30
91
92
270
271
850
851
2510
2511
7000
7001 14400 14401 29000
992 18%NO/N2
18%Nitric Oxide/Nitrogen
24.7
29.7
3
10
11
30
31
94
95
280
281
880
881
2600
2601
7300
7301 15000 15001 30000
993 9%NO/41%N2/H2 9%Nitric Oxide/41%Nitrogen/H2
24.7
29.7
4
10
11
30
31
94
95
281
282
880
881
2610
2611
7700
7701 16000 16001 32000
994 20%H2/Ar
20%Hydrogen/Argon
24.7
29.7
4
13
14
40
41
120
121
370
371
1120
1121
3400
3401
9400
9401 19200 19201 39000
5022 COS-Special
Carbonyl Sulfide (Special)
24.7
29.7
3
7
8
20
21
60
61
183
184
562
563
1700
1701
4500
4501
9400
9401 18300
SH40-SH47
SH48
SH49
SH50
Low High Low High Low High
Low
High
Low
High
Low
High
Low
High
Low
High
Low
High
Low
High
Low
High
Gas
Code Gas Symbol
Gas Name
SH44
SH40
SH43
SH42
SH41
Min inlet pressure for vac. exhaust
(PSIA)
SH49
SH50
SH48
SH45
SH46
SH47
109 C3H9N
Trimethylamine
6.7
8.7
3
8
9
25
26
78
79
240
241
720
721
1910
1911
4000
4001
8100
110 SF6
Sulfur Hexafluoride
19.7
19.7
19.7
20.7
3
8
9
25
26
77
78
237
238
715
716
1900
1901
4000
4001
8000
8001
8200
8201 13400
111 C4H10-d)
Isobutane
19.7
19.7
19.7
20.7
3
7
8
23
24
70
71
216
217
653
654
1800
1801
3800
3801
7600
7601
8200
8201 13200
117 C4H10-c)
Butane
19.7
19.7
19.7
20.7
3
8
9
25
26
76
77
234
235
706
707
1910
1911
4000
4001
8100
8101
8200
8201 14100
118 C2F6
Hexafluoroethane (Freon-116)
19.7
19.7
3
8
9
23
24
71
72
218
219
658
659
1750
1751
3700
3701
7400
121 WF6
Tungsten Hexafluoride
9.7
11.7
3
5
6
16
17
50
51
150
151
460
461
1200
1201
2500
2501
5000
128 C3F8
Perfluoropropane
19.7
19.7
3
5
6
16
17
50
51
154
155
465
466
1200
1201
2500
2501
5100
129 C4F8
Octafluorocyclobutane
19.7
19.7
3
5
6
16
17
50
51
154
155
465
466
1170
1171
2430
2431
4900
138 C3F6
Hexafluoropropylene
19.7
19.7
3
6
7
20
21
60
61
184
185
556
557
1470
1471
3050
3051
6110
155 C2HF5
PENTAFLUOROETHANE (FREO
19.7
19.7
3
8
9
25
26
77
78
235
236
711
712
1900
1901
4000
4001
8000
160 CH2F2
Difluoromethane
24.7
29.7
3
6
7
19
20
57
58
174
175
533
534
1612
1613
4300
4301
9000
9001 18000
185 CH6Si
Methylsilane (MONO)
9.7
14.7
3
4
5
12
13
37
38
111
112
340
341
1050
1051
2800
2801
5900
5901 11600
190 (CH3)3SiH
Trimethylsilane (TMSi)
6.7
3
7
8
20
21
62
63
189
190
572
573
1530
1531
3200
266 C5F8
Octafluorocyclopentene
9.7
14.7
3
5
6
14
15
44
45
134
135
406
407
1050
1051
2200
2201
4500
270 C4F6
Hexafluoro-2-butyne
9.7
3
6
7
19
20
57
58
176
177
533
534
1400
1401
2900
297 C4F6-q)
Hexafluoro Butadiene-1-3
14.7
14.7
3
6
7
17
18
52
53
160
161
500
501
1270
1271
2640
2641
5270
354 C5F8O
Epoxyperfluorocyclopentene
19.7
19.7
3
4
5
13
14
40
41
122
123
369
370
1000
1001
2100
2101
4200
368 Si3H9N
Trisilylamine (TSA)
6.0
7.2
3
6
7
20
21
60
61
181
182
560
561
1410
1411
3000
3001
6000
371 C4H11N
Dimethylethylamine
8.7
8.7
3
6
7
20
21
63
64
190
191
580
581
1530
1531
3200
3201
6500
509 10%GeH4/H2
10%Germane/Hydrogen
20.7
20.7
3
9
10
28
29
86
87
260
261
800
801
2400
2401
7200
7201 15000 15001 30000
516 10%PH3/H2
10%Phosphine/Hydrogen
14.7
14.7
3
9
10
28
29
90
91
275
276
813
814
2500
2501
7600
7601 15500 15501 31000
527 10%PH3/N2
10%Phosphine/Nitrogen
19.7
24.7
3
9
10
30
31
91
92
271
272
850
851
2510
2511
7100
7101 14500 14501 29000
528 4.5%PH3/N2
4.5%Phosphine/Nitrogen
20.7
29.7
3
10
11
30
31
94
95
280
281
880
881
2600
2601
7200
7201 15000 15001 30000
536 20%O2/He
20%Oxygen/Helium
19.7
29.7
4
13
14
38
39
120
121
360
361
1102
1103
3331
3332 10000 10001 21000 21001 42000
537 1%PH3/Ar
1%Phosphine/Argon
19.7
29.7
5
14
15
42
43
128
129
390
391
1200
1201
3600
3601
9800
9801 20000 20001 40000
542 5%H2/N2
5%Hydrogen/Nitrogen
24.7
29.7
3
10
11
30
31
92
93
280
281
860
861
2600
2601
7400
7401 15100 15101 31000
557 1%B2H6/H2
1%Diborane Hydrogen
24.7
29.7
3
10
11
30
31
91
92
270
271
850
851
2510
2511
7900
7901 16100 16101 33000
563 1%PH3/H2
1%Phosphine/Hydrogen
19.7
19.7
3
10
11
30
31
90
91
273
274
850
851
2531
2532
7800
7801 16000 16001 32000
595 3%B2H6/N2
3%Diborane/Nitrogen
20.7
29.7
3
9
10
29
30
90
91
270
271
850
851
2500
2501
7100
7101 14500 14501 29000
597 3%H2/N2
3%Hydrogen/Nitrogen
24.7
29.7
3
10
11
30
31
92
93
280
281
860
861
2600
2601
7400
7401 15100 15101 30100
603 30%He/O2
30%Helium/Oxygen
24.7
29.7
4
11
12
33
34
100
101
301
302
950
951
2800
2801
8100
8101 17000 17001 34000
604 30%O2/He
30%Oxygen/Helium
19.7
29.7
4
12
13
37
38
113
114
345
346
1060
1061
3203
3204
9700
9701 20000 20001 40000
606 4%H2/He
4%Hydrogen/Helium
19.7
19.7
5
14
15
41
42
126
127
400
401
1200
1201
3600
3601 11000 11001 23000 23001 46000
607 4%H2/N2
4%Hydrogen/Nitrogen
24.7
29.7
3
10
11
30
31
92
93
280
281
860
861
2600
2601
7400
7401 15100 15101 30100
615 5%B2H6/Ar
5%Diborane/Argon
24.7
4
12
13
38
39
116
117
353
354
1084
1085
3278
3279
8900
8901 18200
626 5%PH3/Ar
5%Phosphine/Argon
27.7
32.7
5
13
14
41
42
125
126
380
381
1170
1171
3600
3601
9500
9501 19400 19401 39000
632 50%PH3/SiH4
50%Phosphine/Silane
16.7
24.7
3
6
7
20
21
62
63
190
191
580
581
1730
1731
4800
4801 10000 10001 20000
649 10%O2/He
10%Oxygen/Helium
19.7
24.7
5
13
14
41
42
123
124
380
381
1150
1151
3500
3501 10500 10501 22000 22001 44000
653 2%SiH4/N2
2%SILANE/NITROGEN
19.7
24.7
3
10
11
30
31
93
94
280
281
870
871
2600
2601
7300
7301 15000 15001 30000
654 5%B2H6/N2
5%Diborane/Nitrogen
24.7
29.7
3
9
10
28
29
86
87
262
263
804
805
2500
2501
7000
7001 14100 14101 28100
662 .8%B2H6/N2
.8%Diborane/Nitrogen
24.7
29.7
3
10
11
30
31
93
94
280
281
870
871
2600
2601
7300
7301 15000 15001 30000
674 10%PH3/He
10%Phosphine/Helium
14.7
19.7
4
13
14
40
41
120
121
370
371
1100
1101
3400
3401 10000 10001 21000 21001 43000
676 7.5%PH3/SiH4
7.5%Phosphine/Silane
14.7
14.7
3
6
7
19
20
58
59
175
176
540
541
1610
1611
4500
4501
9400
9401 18400
693 5%PH3/He
5%Phosphine/Helium
12.7
14.7
4
13
14
41
42
125
126
380
381
1150
1151
3500
3501 10500 10501 22000 22001 44000
695 2%B2H6/N2
2%Diborane/Nitrogen
24.7
29.7
3
10
11
30
31
93
94
280
281
870
871
2600
2601
7200
7201 15000 15001 30000
698 10%GeH4/Ar
10%Germane/Argon
24.7
29.7
4
12
13
38
39
114
115
350
351
1070
1071
3300
3301
8700
8701 18000 18001 36000
700 4%H2/Ar
4%Hydrogen/Argon
24.7
29.7
5
14
15
42
43
130
131
390
391
1200
1201
3700
3701
9800
9801 20000 20001 40000
701 10%B2H6/H2
10%Diborane/Hydrogen
14.7
14.7
3
8
9
26
27
81
82
241
242
760
761
2300
2301
7000
7001 14200 14201 29000
762 5%H2/He
5%Hydrogen/Helium
19.7
19.7
5
14
15
41
42
125
126
400
401
1200
1201
3600
3601 11000 11001 23000 23001 46000
766 5%B2H6/He
5%Diborane/Helium
14.7
16.7
4
12
13
38
39
115
116
350
351
1100
1101
3300
3301 10000 10001 21000 21001 42000
780 5%SiH4/He
5%Silane/Helium
14.7
16.7
4
13
14
40
41
122
123
380
381
1140
1141
3500
3501 10500 10501 22000 22001 44000
805 1%B2H6/Ar
1%Diborane/Argon
14.7
16.7
5
14
15
42
43
130
131
390
391
1200
1201
3600
3601
9700
9701 20000 20001 40000
820 15%B2H6/H2
15%Diborane/Hydrogen
14.7
14.7
3
8
9
25
26
76
77
230
231
710
711
2120
2121
6500
6501 13300 13301 27000
824 2%SO2/N2
2%Sulfur Dioxide/Nitrogen
14.7
14.7
3
10
11
30
31
93
94
280
281
870
871
2600
2601
7300
7301 15000 15001 30000
837 30%GeH4/Ar
30%Germane/Argon
14.7
14.7
3
10
11
30
31
93
94
280
281
860
861
2600
2601
6900
6901 14100 14101 28100
875 20%O2/Ar
20%Oxygen/Argon
14.7
14.7
4
13
14
39
40
120
121
370
371
1120
1121
3400
3401
9200
9201 19000 19001 38000
Table A-1B GF100 Series Gas Table - Codes 109-875, Bins SH40 to SH50
Table A-1C GF100 Series Gas Table - Codes 878-5022, Bins SH40 to SH50